Large throw magnetic microactuator

Hartley, Andrew C.; Miles, R.E.; Čorda, J.; Dimitrakopoulos, Roussos

doi:10.1016/j.mechatronics.2008.05.012

Cited by 16 publications

(11 citation statements)

References 15 publications

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“…The AFE phase can be induced into ferroelectric (FE) phase under the external sufficient electric field. For the unit cell of the FE phase is larger than that of AFE phase, so the volume of the material changes together with the phase transition [2,3]. W.Y Pan et al [4,5] reported that the strain of (Pb,La)(Zr,Ti,Sn)O 3 antiferroelectric ceramics can reach 0.85%.…”

Section: Intorductionmentioning

confidence: 99%

Microcantilevers Fabrication Process of Silicon-Based (Pb, La)(Zr, Ti)O<sub>3</sub> Antiferroelectric Thick Films for Microactuator Applications

Zhao

Guan

et al. 2011

AMM

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Abstract. (Pb, La) (Zr, Ti)O 3 (PLZT) antiferroelectric thick films were deposited on Pt (111)/ Ti/SiO 2 /Si (100) substrates via sol-gel process. X-ray diffraction (XRD) analysis indicated that the films derived on Pt (111)/ Ti/SiO 2 /Si (100) substrates showed strong (111) preferred orientation. The Bulk and Surface silicon of micromachining process were employed in the silicon-based antiferroelectric thick film microcantilever fabrication, such as wet chemical etching for PLZT, inductive couple plasmas (ICP)for silicon etching, platinum etching and so on. Challenges such as Pt/Ti bottom electrode and morphology of PLZT thick film were solved, the integration of functional antiferroelectric materials and MEMS technology, provide a new way of thinking for the design and manufacture of micro-actuators. IntorductionAntiferroelectric(AFE) materials have received extensive increasing attention due to their potential applications in the integrated devices, such as large displacement micro-actuators and high-strain micro-transducers. [1]. The AFE phase can be induced into ferroelectric (FE) phase under the external sufficient electric field. For the unit cell of the FE phase is larger than that of AFE phase, so the volume of the material changes together with the phase transition [2,3]. W.Y Pan et al [4,5] reported that the strain of (Pb,La)(Zr,Ti,Sn)O 3 antiferroelectric ceramics can reach 0.85%. For (Pb,La)(Zr,Ti,Sn)O 3 bulk-type AFE ceramics, the switching time of phase transition is about 2us, of which is less than 300ns for the AFE thick film [6].Compared with other methods, such as metal organic chemical vapor deposition (MOCVD) [7] techniques, electron beam deposition(EBD) [8]and so on, sol-gel [9] process is one of the most popular technique to fabricate Pb-based antiferroelectric thick films on platinum electrodes because of its simple process, lower price, accurate chemical control and large area production.In this paper, a microcantilever structure is adopted as the driving component. The micro-patterning of PLZT antiferroelectric thick film and the top/bottom electrodes played a key part during the process of preparation, the micro-patterning technology include chemical etching, reactive ion etching, and lift-off technology etc. In this study, the wet chemical etching was introduced for PLZT, inductive couple plasmas (ICP) for silicon etching and sputtering process for electrodes. Series of these processes have successfully realized micro-patterning of the sensitive cell. The difficulties of electrodes etching were solved, which laid a good foundation for further study of silicon-based antiferroelectric thick film micro-actuators. Experimental procedure and analysisThe flow chart, shown in figure.1, depicted the sol-gel deposition process for PLZT antiferroelectric films. At first, acetate trihydrate Pb(CH 3 COO) 2 ·3H 2 O with 10% excess in order to compensate Pb loss during annealing and prevent the formation of the pyrochloren phase, lanthanum acetate hydrate La(CH 3 COO) 3 ·H 2 O and acetate acid CH 3...

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Section: Intorductionmentioning

confidence: 99%

Microcantilevers Fabrication Process of Silicon-Based (Pb, La)(Zr, Ti)O<sub>3</sub> Antiferroelectric Thick Films for Microactuator Applications

Zhao

Guan

et al. 2011

AMM

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“…For RF MEMS, the large displacement could ensure effective isolation for the signal transformation for operation in the region of 10 GHz as reported in [10]. A variety of MEMS switches, including electrothermal [10], electrostatic [11], and electromagnetic [12,13,14,15,16,17,18,19,20], were reported. The electrothermal microswitch usually tends to respond slowly; as a result, its application is limited.…”

Section: Introductionmentioning

confidence: 99%

“…The electromagnetic microactuator mainly consists of the microcoil and the moving membrane, which were fabricated on different wafers, separately. Then, the permanent magnet, membrane, and microcoil were assembled by bonding or via a manual process [15,16,17,18,19,20]. …”

Section: Introductionmentioning

confidence: 99%

Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

Miao

Dai

Huang

et al. 2016

Sensors

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This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic force and elastic force. Both the magnetic force and elastic force were optimized by finite-element simulation to predict the reliable of the device. The prototype was fabricated and characterized. By utilizing thick laminated photoresist sacrificial layer, the large displacement was obtained to ensure the insulation of the microswitch. The testing results show that the microswitch realized the bistable mechanism at a 3–5 V input voltage and closed in 0.96 ms, which verified the simulation.

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“…The planar electromagnetic actuator, especially that made by micro-fabrication technology, has the advantages of small volume and suitability for planar integration. In recent years, the method of integrating a planar coil with a permanent magnet as a micro-actuator has been widely used in micropumps, microvalves and other microelectromechanical systems (MEMS) devices because they can obtain large displacements and a big driving force in the case of a low applied voltage [ 22 , 23 , 24 ]. Tilmans et al [ 22 ] introduced a fully integrated electromagnetic microrelay.…”

Section: Introductionmentioning

confidence: 99%

Variable-Focus Liquid Lens Integrated with a Planar Electromagnetic Actuator

et al. 2016

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In this paper, we design, fabricate and characterize a new electromagnetically actuated variable-focus liquid lens which consists of two polymethyl methacrylate (PMMA) substrates, a SU-8 substrate, a polydimethylsiloxane (PDMS) membrane, a permanent magnet and a planar electromagnetic actuator. The performance of this liquid lens is tested from four aspects including surface profiling, optical observation, variation of focal length and dynamic response speed. The results shows that with increasing current, the optical chamber PDMS membrane bulges up into a shape with a smaller radius of curvature, and the picture recorded by a charge-coupled device (CCD) camera through the liquid lens also gradually becomes blurred. As the current changes from −1 to 1.2 A, the whole measured focal length of the proposed liquid lens ranges from −133 to −390 mm and from 389 to 61 mm. Then a 0.8 A square-wave current is applied to the electrode, and the actuation time and relaxation time are 340 and 460 ms, respectively. The liquid lens proposed in the paper is easily integrated with microfluidic chips and medical detecting instruments due to its planar structure.

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Large throw magnetic microactuator

Cited by 16 publications

References 15 publications

Microcantilevers Fabrication Process of Silicon-Based (Pb, La)(Zr, Ti)O<sub>3</sub> Antiferroelectric Thick Films for Microactuator Applications

Microcantilevers Fabrication Process of Silicon-Based (Pb, La)(Zr, Ti)O<sub>3</sub> Antiferroelectric Thick Films for Microactuator Applications

Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

Variable-Focus Liquid Lens Integrated with a Planar Electromagnetic Actuator

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