Large-scale ferromagnetic enhanced Ar/Cl₂ICP

Abstract

A low frequency (100 kHz) ferromagnetic enhanced inductively coupled plasma (FMICP) source has been developed to obtain a large volume of dense Cl 2 /Ar plasma. The influence of chlorine addition on the FMICP parameters was investigated both experimentally and numerically using a global (volume averaged) model of Ar/Cl 2 discharge. Radial distributions of the positive ions flux as well as the values of FMICP voltage were measured at a fixed FMICP current of 10 A for molecular chlorine concentrations of 0-4 vol%. Plasma species densities were calculated for various values of chlorine content of 0-4 vol% and absorbed power of 500-2000 W. The calculations showed that chlorine ion density exceeds argon ion density even at low chlorine content of about 0.5 vol%. While experimentally measured discharge voltage and power increased almost linearly up to 3 times with chlorine addition, the experimental and numerical data on plasma density demonstrated only a weak dependence on the discharge power. Thereby, at a fixed FMICP current the discharge power adjusts itself to keep plasma density at the same level even despite a significant change in plasma composition.

Distributed ferromagnetic enhanced inductive plasma source for plasma processing

“…In figure 2, a photograph of the gas discharge chamber is shown with both the side and the top FM ICP sources activated. A similar experimental setup design was realized in [3−5], but with a smaller discharge chamber (ID of 56 cm, height of 32 cm) [3,4], without the top FM ICP sources [3,5] or with an RF ICP source placed on the chamber top [4].…”

A two-region model for azimuthal striations in an inductively coupled plasma

“…One of the issues with this type of plasma source may be its non-uniformity in the radial direction. However, a configuration with an array of such sources has been proposed to overcome this problem [11]. If this concept is successfully implemented in the future, one may expect to see a wide application of these sources in various industries.…”