2020
DOI: 10.1088/1361-6595/ab8058
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Large-scale ferromagnetic enhanced Ar/Cl2ICP

Abstract: A low frequency (100 kHz) ferromagnetic enhanced inductively coupled plasma (FMICP) source has been developed to obtain a large volume of dense Cl 2 /Ar plasma. The influence of chlorine addition on the FMICP parameters was investigated both experimentally and numerically using a global (volume averaged) model of Ar/Cl 2 discharge. Radial distributions of the positive ions flux as well as the values of FMICP voltage were measured at a fixed FMICP current of 10 A for molecular chlorine concentrations of 0-4 vol… Show more

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Cited by 4 publications
(2 citation statements)
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“…In figure 2, a photograph of the gas discharge chamber is shown with both the side and the top FM ICP sources activated. A similar experimental setup design was realized in [3−5], but with a smaller discharge chamber (ID of 56 cm, height of 32 cm) [3,4], without the top FM ICP sources [3,5] or with an RF ICP source placed on the chamber top [4].…”
Section: Methodsmentioning
confidence: 99%
“…In figure 2, a photograph of the gas discharge chamber is shown with both the side and the top FM ICP sources activated. A similar experimental setup design was realized in [3−5], but with a smaller discharge chamber (ID of 56 cm, height of 32 cm) [3,4], without the top FM ICP sources [3,5] or with an RF ICP source placed on the chamber top [4].…”
Section: Methodsmentioning
confidence: 99%
“…One of the issues with this type of plasma source may be its non-uniformity in the radial direction. However, a configuration with an array of such sources has been proposed to overcome this problem [11]. If this concept is successfully implemented in the future, one may expect to see a wide application of these sources in various industries.…”
Section: Introductionmentioning
confidence: 99%