Large-scale fabrication of micro-lens array by novel end-fly-cutting-servo diamond machining

Zhu, Zhiwei; To, Suet; Zhang, Shaojian

doi:10.1364/oe.23.020593

Cited by 78 publications

(24 citation statements)

References 33 publications

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“…The broadband light illuminated the sample from the backside of a glass slide. An objective lens (×20, NA = 0.40) of the microscope system was placed on the 11 opposite side of the light source. A CCD camera was used to capture the microscopic images.…”

Section: Resultsmentioning

confidence: 99%

High Numerical Aperture Hexagonal Stacked Ring-Based Bidirectional Flexible Polymer Microlens Array

2017

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Flexible imprinted photonic nanostructures that are able to diffract/focus narrow-band light have potential applications in optical lenses, filters, tunable lasers, displays, and biosensing. Nanophotonic structures through holography and roll-to-roll printing may reduce fabrication complexities and expenses and enable mass production. Here, 3D photonic nanostructures of a stacked ring array were imprinted on acrylate polymer (AP) over poly(ethylene terephthalate) (PET) substrate through holography and lift-off processes to create a microlens array (MLA). The surface structure of the array consisted of circular nonostepped pyramids, and repeated patterns were in hexagonal arrangements. Stacked-ring-based MLA (SMLA) on a flexible AP-PET substrate showed efficient bidirectional light focusing and maximum numerical aperture (NA = 0.60) with a reasonable filling factor. The nanostructures produced a well-ordered hexagonally focused diffraction pattern in the far field, and power intensities were measured through angle-resolved experiments. The variation of nanostep dimensions (width and height) and the number of steps resulted in different photonic bandgaps, and the arrays produced distance-dependent narrow-band light focusing. The validation of the SMLA was demonstrated through the text, image, and hologram projection experiments. It is anticipated that imprinted bidirectional SMLA over flexible substrates may find applications in optical systems, displays, and portable sensors.

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Section: Resultsmentioning

confidence: 99%

High Numerical Aperture Hexagonal Stacked Ring-Based Bidirectional Flexible Polymer Microlens Array

2017

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“…Flexible fabrication of microlens with controlled profile and smooth surface is the mutual requirement for this kind of hard materials. For these reasons, various strategies have been proposed to fabricate micro‐optics from hard and ultrahard materials, for example, photolithography followed with reactive ion etching. Photolithographically defined masks followed with reactive ion etching does not allow high fill factor microlens arrays to be realized and cannot precisely control the profile of the microlenses.…”

Section: Introductionmentioning

confidence: 99%

Optical Nanofabrication of Concave Microlens Arrays

Liu

Lei

Yang

et al. 2019

Laser & Photonics Reviews

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For the simple and versatile fabrication of nanosmooth finished microlens arrays on hard materials, an approach combining femtosecond laser modification with subsequent ion beam etching is demonstrated. This method is based on the dependence of the plasma etching rate on the laser fluence used to modify the surface. The fabricated microlenses exhibit a low surface roughness of approximately 2.5 nm, due to the high precision of the plasma etching and benefit from the smooth interface between the laser‐modified and pristine subsurface regions. Microlenses with focal lengths ranging from 60 to 100 µm are realized by controlling the laser fluence, exposure dose, and etching time. Uniform square and hexagonal microlens arrays are fabricated on both hard and ultrahard materials and glasses (fused silica, GaAs, SiC, diamond) by the same process and deliver high‐quality focusing and imaging.

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“…The cylindrical roller mold containing millions of micro lenses plays a key role in the RTR technique. Although various fabrication methods have already been proposed, including chemical etching [ 9 ], laser lithography [ 10 ], diamond broaching [ 11 ], and end-fly-cutting [ 12 ], the methods mentioned are not suitable for fabricating MLAs on the cylindrical roller mold due to their limitations. Micro-milling is also used for fabricating various microstructures on flat or roll molds [ 13 , 14 , 15 , 16 ], which can cut nonferrous metal and tool steel.…”

Section: Introductionmentioning

confidence: 99%

Experimental Investigation on Form Error for Slow Tool Servo Diamond Turning of Micro Lens Arrays on the Roller Mold

Liu¹,

Qiao²,

Qu³

et al. 2018

Materials

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Slow tool servo (STS) assisted ultra-precision diamond turning is considered as a promising machining process with high accuracy and low cost to generate the large-area micro lens arrays (MLAs) on the roller mold. However, the chatter mark is obvious at the cut-in part of every machined micro lens along the cutting direction, which is a common problem for the generation of MLAs using STS. In this study, a novel forming approach based on STS is presented to fabricate MLAs on the aluminum alloy (6061) roller mold, which is a high-efficiency machining approach in comparison to a traditional method based on STS. Based on the different distribution patterns of the discrete point of micro lens, the equal-arc method and the equal-angle method are also proposed to generate the tool path. According to a kinematic analysis of the cutting axis, the chatter mark results from the overlarge instantaneous acceleration oscillations of the cutting axis during STS diamond turning process of MLAs. Cutting parameters including the number of discrete points and cutting time of every discrete point have been experimentally investigated to reduce the chatter mark. Finally, typical MLAs (20.52-μm height and 700-μm aperture) is successfully machined with the optimal cutting parameters. The results are acquired with a fine surface quality, i.e., form error of micro lenses is 0.632 μm, which validate the feasibility of the new machining method.

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Large-scale fabrication of micro-lens array by novel end-fly-cutting-servo diamond machining

Cited by 78 publications

References 33 publications

High Numerical Aperture Hexagonal Stacked Ring-Based Bidirectional Flexible Polymer Microlens Array

High Numerical Aperture Hexagonal Stacked Ring-Based Bidirectional Flexible Polymer Microlens Array

Optical Nanofabrication of Concave Microlens Arrays

Experimental Investigation on Form Error for Slow Tool Servo Diamond Turning of Micro Lens Arrays on the Roller Mold

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