Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO3 layer transfer

Pijolat, M.; Loubriat, S.; Queste, S.; Mercier, Denis; Reinhardt, Alexandre; Defaÿ, E.; Deguet, C.; Clavelier, L.; Moriceau, H.; Aid, M.; Ballandras, S.

doi:10.1063/1.3258496

Cited by 37 publications

(27 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…On the other hand, the demonstrated devices exhibit strong coupling between the optical cavity mode and the mechanical motion of the device structures, with which we were able to characterize the rich nanomechanical motions of the device. We observed mechanical modes with frequency up to 1.003 GHz with a f · Q product of 1.47 × 10 12 Hz that is comparable to state-ofthe-art LN micromechanical devices 5,6,24,53 . The devices exhibit a single-photon/single-phonon optomechanical coupling rate of |g o | 2π = 71 kHz that is comparable to most other optomechanical crystals [54][55][56][57][58] , although our devices are not specifically designed for optomechanical applications.…”

Section: Conclusion and Discussionmentioning

confidence: 57%

See 1 more Smart Citation

High-quality lithium niobate photonic crystal nanocavities

Liang

Luo

et al. 2017

Optica

149

130

View full text Add to dashboard Cite

Lithium niobate (LN) exhibits unique material characteristics that have found many important applications. Scaling LN devices down to a nanoscopic scale can dramatically enhance light-matter interaction that would enable nonlinear and quantum photonic functionalities beyond the reach of conventional means.However, developing LN-based nanophotonic devices turns out to be nontrivial. Although significant efforts have been devoted in recent years, LN photonic crystal structures developed to date exhibit fairly low quality. Here we demonstrate LN photonic crystal nanobeam resonators with optical Q as high as 10 5 , more than two orders of magnitude higher than other LN nanocavities reported to date. The high optical quality together with tight mode confinement leads to extremely strong nonlinear photorefractive effect, with a resonance tuning rate of ∼0.64 GHz/aJ, or equivalently ∼84 MHz/photon, three orders of magnitude greater than other LN resonators. In particular, we observed intriguing quenching of photorefraction that has never been reported before. The devices also exhibit strong optomechanical coupling with gigahertz nanomechanical mode with a significant f · Q product of 1.47 × 10 12 Hz. The demonstration of high-Q LN photonic crystal nanoresonators paves a crucial step towards LN nanophotonics that could integrate the outstanding material properties with versatile nanoscale device engineering for diverse intriguing functionalities. * These authors contributed equally to this work. † Electronic address: qiang.lin@rochester.edu 1 arXiv:1706.08904v2 [physics.optics]

show abstract

Section: Conclusion and Discussionmentioning

confidence: 57%

“…Detailed characterization (Fig. 6(c)) shows that this mode exhibits an intrinsic mechanical Q of 1465, corresponding to a f · Q product of 1.47 × 10 12 Hz, which is comparable to state-of-the-art LN micromechanical resonators 5,6,24,53 .…”

Section: Nano-optomechanical Propertiesmentioning

confidence: 85%

High-quality lithium niobate photonic crystal nanocavities

Liang

Luo

et al. 2017

Optica

149

130

View full text Add to dashboard Cite

show abstract

“…High overtones Bulk Acoustic Resonators (HBAR) have been fabricated as test vehicles. On Figure 8, measurements show high order harmonics of the HBAR modulated by the first harmonics of thinned LiNbO 3 layer, for bond and etch back (Figure 8a) [6] and Smart Cut™ technology (Figure 8b) [7]. From these data, extracted electro-mechanical coupling a b…”

Section: -Electrical Resultsmentioning

confidence: 99%

LiNbO₃ Single Crystal Layer Transfer Techniques for High Performances RF Filters

Deguet¹,

Pijolat²,

Blanc³

et al. 2010

ECS Trans.

View full text Add to dashboard Cite

In this paper we present the realization of engineered substrates based on thin single crystal piezoelectric layers. Their potential interest for next generation of ultra wide band RF filters has been demonstrated. For this purpose we propose two different methods to transfer a thin monocrystalline layer: the Smart Cut™ technology and a "bond and etch back" technology. Lithium Niobate (LiNbO 3 ) has been chosen for its high electromechanical coupling factor of about 45% for bulk acoustic waves but also for its availability as single crystal wafers diameters up to 6 inches. Engineered substrate process, material and electrical characterizations are presented. The first objective of this study is to demonstrate LiNbO 3 piezoelectric property preservation after processes whatever the used technology. High overtone Bulk Acoustic Resonators have been used as test vehicles to characterize these layers so as to evaluate layer transfer achievement of sub micron single crystal LiNbO 3 .

show abstract

“…In order to reach larger electromechanical coupling factors, Pijolat et al proposed to use X-cut lithium niobate [29]. Although this crystal orientation supports two piezoelectrically coupled shear waves, and hence does not promote a pure bulk wave, its fast shear wave exhibits an electromechanical coupling factor of 45 %.…”

Section: B Linbo 3 For Baw Applicationsmentioning

confidence: 98%

Acoustic filters based on thin single crystal LiNbO<inf>3</inf> films: Status and prospects

Reinhardt

Benaissa

David

et al. 2014

2014 IEEE International Ultrasonics Symposium

View full text Add to dashboard Cite

Lithium niobate has been extensively used in the Surface Acoustic Wave (SAW) industry for its excellent piezoelectric properties. In the last twelve years, the interest has been raised towards making this material available in the thin film form for SAW or Bulk Acoustic Wave (BAW) applications, and even for Lamb wave devices. This paper reviews both deposition or thin film transfer techniques to obtain lithium niobate thin films. It also gives a brief overview of the applications of these thin films. Finally, we open new perspectives for this technology with the emerging field of tunable acoustic filters, which need extremely large piezoelectric properties to demonstrate satisfying performance.

show abstract

Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO3 layer transfer

Cited by 37 publications

References 7 publications

High-quality lithium niobate photonic crystal nanocavities

High-quality lithium niobate photonic crystal nanocavities

LiNbO₃ Single Crystal Layer Transfer Techniques for High Performances RF Filters

Acoustic filters based on thin single crystal LiNbO<inf>3</inf> films: Status and prospects

Contact Info

Product

Resources

About

Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO3 layer transfer

Cited by 37 publications

References 7 publications

High-quality lithium niobate photonic crystal nanocavities

High-quality lithium niobate photonic crystal nanocavities

LiNbO3 Single Crystal Layer Transfer Techniques for High Performances RF Filters

Acoustic filters based on thin single crystal LiNbO<inf>3</inf> films: Status and prospects

Contact Info

Product

Resources

About

LiNbO₃ Single Crystal Layer Transfer Techniques for High Performances RF Filters