Large-Displacement Micro-XY-Stage with Paired Moving Plates

Sasaki, Minoru; Bono, Fuminori; Hane, Kazuhiro

doi:10.1143/jjap.47.3226

Cited by 24 publications

(19 citation statements)

References 14 publications

(16 reference statements)

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“…The difference between the frequencies for the X and Y directions relies on the asymmetrical structure of the stage. These resonant frequencies are comparable with reported microstages [4][5][6][7][8]. …”

Section: Resultssupporting

confidence: 89%

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A large displacement piezodriven silicon XY-microstage

Sabri

Ono

Esashi

2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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This paper present the fabrication and integration processes employed in order to realize the Si-PZT hybrid XY-microstage. A silicon XY-microstage with dimensions of 20×20×0.4 mm containing Moonie amplification mechanisms is fabricated and evaluated. The experimental results show that this microstage containing a commercial PZT actuator and Moonie angle of 2 degrees produced a displacement of 82 µm and 60 µm at 70 V for the X and Y directions, respectively. The fabricated microstage demonstrates that the designed amplification mechanism is able to magnify the stroke up to 18 times.

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Section: Resultssupporting

confidence: 89%

“…Such systems generally require large actuation strokes with a resolution of the nanometer range [3]. In addition, a high resonant frequency and low driving voltage are desirable for the operation of the microstage [4].…”

Section: Introductionmentioning

confidence: 99%

A large displacement piezodriven silicon XY-microstage

Sabri

Ono

Esashi

2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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“…The analytical relations for the motion and bearing stiffness of the C-DP-DP and P flexures have been separately derived [36]. For the case of optimal clamp dimensions W 2 3…”

Section: Actuation Stroke and Effortmentioning

confidence: 99%

“…This displacement appears as error motion (E x = δ) in equation (2), and therefore reduces the Y max . This implies that, to accommodate this error motion, one has to employ a finite stability margin (S), which is mathematically captured previously [7,22].…”

Section: Actuator Error Motion In Comb-drive Sets Due To the Cross-axmentioning

confidence: 99%

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Large range dual-axis micro-stage driven by electrostatic comb-drive actuators

Olfatnia¹,

Cui²,

Chopra³

et al. 2013

J. Micromech. Microeng.

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This paper presents a micro XY stage that employs electrostatic comb-drive actuators and achieves a bi-directional displacement range greater than 225 μm per motion axis. The proposed XY stage design comprises four rigid stages (ground, motion stage, and two intermediate stages) interconnected via flexure modules. The motion stage, which has two translational degrees of freedom, is connected to two independent single degree of freedom intermediate stages via respective parallelogram (P) transmission flexures. The intermediate stages are connected to the ground via respective clamped paired double parallelogram (C-DP-DP) guidance flexures. The C-DP-DP flexure, unlike conventional flexures such as the paired double parallelogram flexure (DP-DP), provides high bearing direction stiffness (K b) while maintaining low motion direction stiffness (K m) over a large range of motion direction displacement. This helps delay the onset of sideways instability in the comb-drive actuators that are integrated with the intermediate stages, thereby offering a significantly greater actuation stroke compared to existing designs. The presented work includes closed-form stiffness analysis of the proposed micro-stage, finite elements simulation, and experimental measurements of its static and dynamic behavior.

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