Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings

Photoluminescence enhancement induced by nanoparticles from La2O3 and CeO2 doped diamond-like carbon films

“…With the lacking of energy sources in recent years, the research on DLC films as anti-reflection coatings has attracted more and more attention, attributing to that DLC films have wide bandgaps, and adjustable refractive indices [3,4]. The DLC coated Si solar cells increase the solar cell efficiency by 20% [1], and the transmission efficiency in the infrared and visible regions is 68.83 and 85%, respectively, close to theoretical value for nonabsorption carbon material [5,6]. For the development of solar cells, the pure DLC anti-reflection coatings can not meet the requirements of photoconversion, such as low photoconversion efficiency, photoluminescence (PL), etc., of pure DLC films, thus doping elements into DLC films is attempted to improve the optical properties of DLC films [7].…”

“…It has the characteristics of conventional magnetron sputtering and ion-assisted deposition. The additional magnetron field extends an ionized region near the substrate and then makes ion bombardment on the growing film, resulting in the improving of the coatings, and releasing the residual compressive stress [5].…”

Deposition of Large‐Area and Protective Diamond‐like Carbon Coatings on Glass Substrates by Low‐Pressure Dielectric Barrier Discharges

“…The ratio of sp 3 (CH þ CH 2 )/ sp 2 (CH þ CH 2 ) varied from 105 to 58, depending on CH 4 pressure, which was consistent with the previous ratios of DLC films deposited in a small DBD chamber.…”

“…In the fields of infrared communication and solar cell systems, DLC films are important new infrared anti-reflection protective materials. [4,5] To date, DLC films have been deposited using plasma-enhanced (PE)CVD, [5] sputtering, [4] mass-selected ion beams, [3] filtered cathodic vacuum arcs, [6] and pulsed laser ablation, [7] however most of these techniques are limited in their areal coverage. Since the treated samples have to be put into the vacuum chamber, it is relatively expensive to build a large-area vacuum deposition system.…”

Optical characterization of hydrogen-free CeO2 doped DLC films deposited by unbalanced magnetron sputtering

“…The additional magnetron field is able to extend an ionized region near the substrate and then causes ion bombardment on the growing film, thereby modifying the properties of the coatings, and releasing the films stress. It allows the simple and relatively inexpensive lowtemperature coating of a range of temperature sensitive substrates over a large area and allows for the uniform coating of substrates having different shapes and sizes [22][23][24].…”