1992
DOI: 10.1557/proc-258-1145
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Large Area 2-Dimensional a-Si:H Imaging Arrays

Abstract: Six inch diagonal, two-dimensional amorphous silicon imaging arrays with 256×240 pixels of 450 micron pitch have been fabricated. Examples of images made under visible light and X-rays illustrate applications to electronic document input and medical imaging. The limits to the array performance are explored through studies of image lag due to deep trapping at dangling bond defects in the a-Si:H sensor, and through measurements of electronic noise.

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Cited by 29 publications
(10 citation statements)
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“…Thus, both the photodiode ͑through bulk effects͒ and the TFT ͑through surface effects͒ are potential sources of charge trapping; however, the former is typically identified as the dominant source. 25,46 As reported elsewhere, 10,11,14 image lag is reduced by: ͑1͒ illuminating the photodiode through the p layer; ͑2͒ operating the photodiode at a high bias voltage ͑e.g., V bias ϳϪ5 V͒; and ͑3͒ operating at signal levels far below sensor saturation.…”
Section: Referencementioning
confidence: 85%
“…Thus, both the photodiode ͑through bulk effects͒ and the TFT ͑through surface effects͒ are potential sources of charge trapping; however, the former is typically identified as the dominant source. 25,46 As reported elsewhere, 10,11,14 image lag is reduced by: ͑1͒ illuminating the photodiode through the p layer; ͑2͒ operating the photodiode at a high bias voltage ͑e.g., V bias ϳϪ5 V͒; and ͑3͒ operating at signal levels far below sensor saturation.…”
Section: Referencementioning
confidence: 85%
“…The amount of trapped signal increases as the electric field strength across the photodiode decreases. 30 This occurs if V bias is decreased and/or if the incident light signal, and hence the pixel signal size, increases. In radiographic mode, this trapping has the negative consequence of essentially reducing the useful optical imaging quanta.…”
Section: The Effects Of Trapping Statesmentioning
confidence: 99%
“…The domain in which the above approximation is specified is described (11) Here, is an integer of the form . The geometrical meaning of will be discussed later.…”
Section: A Green's Functionmentioning
confidence: 99%
“…4). These capacitances can give rise to feedthrough charge and electronic noise, which undermine the quality of the image generated [11], [12]. From a computational standpoint, the main difficulties in the numerical extraction of capacitance include the following.…”
Section: Quasi-static Parasitic Coupling Capacitancementioning
confidence: 99%