Kinetic modelling of atom production and thermalization in CCRF discharges in H<sub>2</sub>

Panarese, Antonio; Diomede, P.; Longo, S.

doi:10.1088/0963-0252/22/4/045017

Cited by 11 publications

(14 citation statements)

References 55 publications

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“…Therefore, the IED is centered at eV s and has two peaks split by E i proportional to V . Both the average sheath potential and the applied voltage increase with increasing driving current in cases 1-4, then the IEDs shift to high-energy [44]. The low-energy part of the NED is well fitted by a Maxwellian distribution at the gas temperature, while the NED has a long superthermal tail.…”

Section: Effect Of Driving Currentmentioning

confidence: 87%

A current driven capacitively coupled chlorine discharge

Huang

Guðmundsson

2014

Plasma Sources Sci. Technol.

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The effect of driving current, driving frequency and secondary electrons on capacitively coupled chlorine discharge is systematically investigated using a hybrid approach consisting of a particle-in-cell/Monte Carlo simulation and a volume-averaged global model. The driving current is varied from 20 to 80 A m −2 , the driving frequency is varied from 13.56 to 60 MHz and the secondary electron emission coefficient is varied from 0.0 to 0.4. Key plasma parameters including electron energy probability function, electron heating rate, ion energy and angular distributions are explored and their variations with control parameters are analyzed and compared with other discharges. Furthermore, we extend our study to dual-frequency (DF) capacitively coupled chlorine discharge by adding a low-frequency current source and explore the effect of the low-frequency source on the discharge. The low-frequency current density is increased from 0 to 4 A m −2 . The flux of Cl + 2 ions to the surface increases only slightly while the average energy of Cl + 2 ions to the surface increases almost linearly with increasing low-frequency current, which shows possible independent control of the flux and energy of Cl + 2 ions by varying the low-frequency current in a DF capacitively coupled chlorine discharge. However, the increase in the flux of Cl + ions with increasing low-frequency current, which is mainly due to the increased dissociation fraction of the background gas caused by extra power supplied by the low-frequency source, is undesirable.

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Section: Effect Of Driving Currentmentioning

confidence: 87%

A current driven capacitively coupled chlorine discharge

Huang

Guðmundsson

2014

Plasma Sources Sci. Technol.

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“…Without detailed numerical modelling (see e.g. [33]) most of the information is qualitative, but nevertheless interesting details, some of them rather unexpected, become evident. For example, it became clear, that in the initial few hundreds of µs the velocity distribution of the 'fast' atoms is not isotropic, leading to an asymmetry of the pedestal of the H α line.…”

Section: Conclusion and Future Plansmentioning

confidence: 99%

Experimental study of the evolution of H α line profile in a pulse hydrogen discharge

Bozhinova¹,

Pashov²,

Iordanova³

2022

J. Phys. D: Appl. Phys.

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This study reports on experimental technique for investigation of the dynamics of neutrals in direct current hydrogen discharges at low pressures. It is based on analysis of anomalous broadening of the H α emission line profile in a pulsed regime of operation of the source. The application of the technique is relatively simple and it is illustrated in a coaxial discharge tube, but can be readily extended to various discharge sources. The emission line is analyzed by a Fabry-Pérot interferometer and therefore high spectral resolution and fast temporal response can be combined. By observing the evolution of the profile with the pulse duration the experimental technique, extended with numerical modelling, gives opportunity for obtaining useful information about the temporal dependence of the processes responsible for formation of the components of the profile.

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“…In the past, we included in models much more simplified geometry, some refined aspects of transport physics: for example, the thermalization of high-energy radicals produced by exothermic reactions [Panarese, 2013] and the transport of atomic particles in transonic and viscous gas flows (including shocks), calculated in turn by non-linear stochastic techniques for the same reactor geometry . These routines are now going rewritten to be included in the GAS code.…”

Section: Models Of Neutral Transport In Plasma Reactorsmentioning

confidence: 99%

Stochastic models of systems for Nanotechnology: from micro to macro scale

Longo

Hassouni

et al. 2021

Nanotechnology

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Computer modeling technique based on the theory of stochastic processes have been used in order to provide a realistic simulation of the behavior of nanoscopic systems, related in particular to plasma reactors in microelectronic device production. Basing on decades of experience, we show here, with new results, that the universality of such methods allows the development of codes with the highest reusability and versatility, crossing the barrier of scale. At the smallest scale, the quantum calculation of the potential energy surface and spectroscopic properties of hydrogen species under nanoconfinement conditions display the effects due to the dimension and the symmetry of the confining potential well. Nanoparticles dispersed as aerosol in plasma feature strong fluctuations in temperature and charge which may affect the processing of silicon wafers. At the macroscopic scale, using a stochastic solution of transport equations, it is possible to describe laboratory or industrial systems for the production or treatment of nanomaterials, also exploiting the analogy between neutral particle transport and radiative transfer and information obtained by molecular simulations. These findings are relevant in the control of solid-particle contamination in the manufacture of electronic components and in other fields.

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Kinetic modelling of atom production and thermalization in CCRF discharges in H₂

Cited by 11 publications

References 55 publications

A current driven capacitively coupled chlorine discharge

A current driven capacitively coupled chlorine discharge

Experimental study of the evolution of H α line profile in a pulse hydrogen discharge

Stochastic models of systems for Nanotechnology: from micro to macro scale

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Kinetic modelling of atom production and thermalization in CCRF discharges in H2

Cited by 11 publications

References 55 publications

A current driven capacitively coupled chlorine discharge

A current driven capacitively coupled chlorine discharge

Experimental study of the evolution of H α line profile in a pulse hydrogen discharge

Stochastic models of systems for Nanotechnology: from micro to macro scale

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Kinetic modelling of atom production and thermalization in CCRF discharges in H₂