1996
DOI: 10.1016/0169-4332(95)00552-8
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Kinetic energy distributions of ions ejected during laser ablation of lead zirconate titanate and their correlation to deposition of ferroelectric thin films

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Cited by 13 publications
(5 citation statements)
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“…This behavior can be explained by an additional decrease of the PTO resistance due to formation of lead and/or oxygen vacancies during PLD from pre-ablated target. [22][23][24][25] Assuming that the low-frequency losses are related to the PTO resistance, the dynamic resistance R F of the PTO films can be estimated as R F % (2 Á tan D Á CÞ À1 . 28,29 The resistance is approximately 6 k in the 300*-nm-thick PTO and it is larger than 10 M in other films.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…This behavior can be explained by an additional decrease of the PTO resistance due to formation of lead and/or oxygen vacancies during PLD from pre-ablated target. [22][23][24][25] Assuming that the low-frequency losses are related to the PTO resistance, the dynamic resistance R F of the PTO films can be estimated as R F % (2 Á tan D Á CÞ À1 . 28,29 The resistance is approximately 6 k in the 300*-nm-thick PTO and it is larger than 10 M in other films.…”
Section: Resultsmentioning
confidence: 99%
“…The procedure is known to induce lead and/or oxygen vacancies in the PTO deposit because of compositional changes on the surface of the ablated PTO target. [22][23][24][25] The sample is denoted as \300*-nm" herein.…”
Section: Methodsmentioning
confidence: 99%
“…For example, a class-1000 clean room facility contains about 300 particles per m 3 with more than 5-µm radius, 8300 particles with more than 1-µm radius and 35,000 particles with more than 0.5-µm radius [36][37][38] . Particle contamination can be further aided by electrostatic charges that may be generated by electron and ion emission from the surface during laser irradiation [39][40][41][42] .…”
Section: Introductionmentioning
confidence: 99%
“…Particle contamination can be further aided by electrostatics charges that may be generated by electron and ion emission from the surface during laser irradiation [39][40][41][42] .…”
mentioning
confidence: 99%
“…However, proper control of the microstructure, grain size, porosity, and crystallinity have remained major issues [28,29,40,[45][46][47][48]. Physical deposition techniques such as pulsed laser deposition (PLD) are also challenging for the growth of PZT thin films due to the high volatility of Pb in PZT that leads to its non-stoichiometric ablation and results in Pb-deficient PZT films exhibiting poor FE properties [49,50,51]. Among the few reports on the PLD grown PLZT thin films almost all of them discuss polycrystalline PLZT thin film properties [41,[52][53][54].…”
Section: Introductionmentioning
confidence: 99%