Abstract:In this work, a wet chemical etching technique has been used to estimate the depth of a p-n junction. The wet chemical etchant used is HF/HNO 3 /H 2 O solution. Subsequent to this process, optical and electron microscope imaging of crosssection was done to estimate the junction depth. This technique has been used for characterizing deep junction (up to 10 µm) formed by laser doping. Sheet resistances were measured after laser doping on 10 mm × 10 mm area with different scan speed from a heavily doped emitter. … Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.