Joint effect of chemostimulator (Sb2O3, Bi2O3, MnO2) compositions with an inert component (Al2O3) on gallium arsenide thermal oxidation

Penskoi, P. K.; Kostryukov, V. F.; Pshestanchik, V. R.; Mittova, I. Ya.

doi:10.1134/s0012500807060055

Search citation statements

Order By: Relevance

Paper Sections

Select...

Results1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2014

Publication Types

Select...

Article1

Relationship

Self Cite1

Independent0

Authors

Journals

Cited by 1 publication

(1 citation statement)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As shown in our studies of the effect of oxide stim ulators on the thermal oxidation of semiconductors (Table 2), it is reasonable to use such stimulators for accelerating the growth of semiconducting and dielec tric films and tailoring their properties [17]. Note that p element oxides acted as oxygen transfer agents [18].…”

Section: Resultsmentioning

confidence: 99%

Influence of the physicochemical nature of chemical stimulators and the way they are introduced into a system on the mechanism of the thermal oxidation of GaAs and InP

Mittova

2014

Inorg Mater

Self Cite

View full text Add to dashboard Cite

Studies of the chemically stimulated thermal oxidation of GaAs and InP demonstrate that the physicochemical nature of the chemical stimulator determines the mechanism of the process and the possi bility of introducing it into the system in different ways. It has been shown that, when a chemical stimulator is introduced through the gas phase or applied to a semiconductor surface by mild methods, the oxidation process follows an oxygen transfer mechanism. When harsh methods are used to apply chemical stimulators that ensure persistent cyclic behavior of the process, it follows a synchronous catalytic mechanism.

show abstract

Section: Resultsmentioning

confidence: 99%