Issues for Automation in Semiconductor Manufacturing

Abstract

This survey sketches the importance of Automatic Control Engineering with all its flavors for state-of-the-art semiconductor manufacturing. Many automation disciplines are required for maximization of production yield, high throughput, low delivery times and little lateness. Tools for accomplishing these goals are hybrid dynamic modeling, advanced simulation and scheduling techniques, complex robustness calculations and comprehensive performance monitoring and justification methods.

The correct level of model complexity in semiconductor fab simulation — Lessons learned from practice

“…Moreover, it is much easier to adjust or discard them if they turn out to be wrong or the real system changes. Apart from that, runtime usually increases with growing model detail-this is especially true for complex semiconductor front-end manufacturing systems: [13] describes an automated material handling system (AMHS) simulation model that incorporates complex algorithms, leading to a ratio of simulation to real time of 20:1 (which typically should be located in the range of 1000:1 to 10000:1). The large runtime restricted the model's field of application on strategic issues.…”