2013
DOI: 10.1002/jctb.4136
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Photoreduction of nitrogen trifluoride with controlled release of radicals

Abstract: BACKGROUND: With the rapid growth of the semiconductor and thin film transistor liquid crystal display manufacturing industries, large quantities of the potent greenhouse gas nitrogen trifluoride (NF 3 ) is in demand. But perfluorocarbons are very stable compounds because of their molecular structures. Therefore, in the atmosphere, NF 3 is difficult to oxidize by O 3 , NO, NO 2 , and OH radicals, except by excited oxygen atoms O( 1 D) that can react with it to form NF 2 or other products. In this study the pos… Show more

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Cited by 6 publications
(3 citation statements)
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“…Key to realizing this goal is generating versatile sets of diverse biocatalysts capable of constructing building blocks, assembling them into core scaffolds, and further diversifying those scaffolds. While tremendous progress has been made using both in vivo and purified in vitro systems, knowledge gaps still exist in how individual biosynthetic enzymes function and how multiple enzymes can be assembled to create novel pathways [76,77] . In addition, the number of putative biosynthetic gene clusters greatly outnumbers those that have been characterized.…”
Section: Discussionmentioning
confidence: 99%
“…Key to realizing this goal is generating versatile sets of diverse biocatalysts capable of constructing building blocks, assembling them into core scaffolds, and further diversifying those scaffolds. While tremendous progress has been made using both in vivo and purified in vitro systems, knowledge gaps still exist in how individual biosynthetic enzymes function and how multiple enzymes can be assembled to create novel pathways [76,77] . In addition, the number of putative biosynthetic gene clusters greatly outnumbers those that have been characterized.…”
Section: Discussionmentioning
confidence: 99%
“…In the cases of NF 3 , CHF 3 , C 2 F 6 , and C 3 F 8 , DRE was higher in the WF type than in the etch type. The N-F bond energy of NF 3 is 278 kJ/mol, so it does not require very high temperatures for decomposition [38]. WF prevented the recombination of each gas by causing a reaction as shown in Equations ( 62)-( 70) and was subsequently converted to HF.…”
Section: Rate Of By-product Gas Generationmentioning
confidence: 99%
“…Further study on discharging with air in different humidity was also investigated in this work. Hydroxyl free radical and H• generated from H 2 O could react with intermediates, such as SF 5 and SF 4 (generated from SF 6 decomposition), which could further accelerate the decomposition of SF 6 [13] . Some related experiments were conducted and the results indicated that when the additive air was humidified, D(SF 6 ) increased by 23% at least.…”
Section: Relative Humiditymentioning
confidence: 99%