Irradiation effects of CO<sub>2</sub>laser parameters on surface morphology of fused silica

向霞,; 郑万国,; 袁晓东,; 戴威,; 蒋勇,; 李熙斌,; 王海军,; 吕海兵,; 祖小涛,

doi:10.1088/1674-1056/20/4/044208

Cited by 14 publications

(8 citation statements)

References 23 publications

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“…Three typical surface morphologies (see Figure 2) of fused silica induced by 10.6 m CO 2 laser irradiation are observed [37], showing that obvious distortion does not occur for the material temperature below the softening point at low laser power; distortion occurs with the increase of laser power which means the material temperature is above the softening point; once the material temperature reaches the evaporation point, the surface distortion becomes clearer and a black ring appears around it, which has been identified as the debris being redeposited or recondensed from evaporated fused silica [38].…”

Section: Crater Morphologymentioning

confidence: 98%

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Laser-Induced Damage Initiation and Growth of Optical Materials

et al. 2014

Advances in Condensed Matter Physics

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The lifetime of optical components is determined by the combination of laser-induced damage initiation probability and damage propagation rate during subsequent laser shots. This paper reviews both theoretical and experimental investigations on laser-induced damage initiation and growth at the surface of optics. The damage mechanism is generally considered as thermal absorption and electron avalanche, which play dominant roles for the different laser pulse durations. The typical damage morphology in the surface of components observed in experiments is also closely related to the damage mechanism. The damage crater in thermal absorption process, which can be estimated by thermal diffusion model, is typical distortion, melting, and ablation debris often with an elevated rim caused by melted material flow and resolidification. However, damage initiated by electron avalanche is often accompanied by generation of plasma, crush, and fracture, which can be explained by thermal explosion model. Damage growth at rear surface of components is extremely severe which can be explained by several models, such as fireball growth, impact crater, brittle fracture, and electric field enhancement. All the physical effects are not independent but mutually coupling. Developing theoretical models of multiphysics coupling are an important trend for future theoretical research. Meanwhile, more attention should be paid to integrated analysis both in theory and experiment.

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Section: Crater Morphologymentioning

confidence: 98%

“…Three typical surface morphologies observed in the laser irradiated areas of fused silica induced by 10.6 m CO 2 laser irradiation[37].…”

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confidence: 99%

Laser-Induced Damage Initiation and Growth of Optical Materials

et al. 2014

Advances in Condensed Matter Physics

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“…[4] At present, the repair methods for the damage of fused silica components mainly include CO 2 laser repair [5], hydrofluoric acid etching [6], plasma etching, and micro flame processing. Among them, CO 2 laser repair has achieved a good repair effect and has become the main means of repairing optical elements; [7,8] however, the current repair technology has some limitations. The main repair object is large-scale individual damage, ignoring the frequent small-scale cluster damage.…”

Section: Introductionmentioning

confidence: 99%

Layer-by-Layer Repair of Small-Scale Damage of Fused Silica Based on the Magnetorheological Method

et al. 2021

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The magnetorheological (MR) repair method can effectively repair the small-scale damage of fused silica optics and further improve the laser-induced damage threshold of fused silica optics. However, at present, the rules of MR repair of small-scale damage of fused silica are not clear and cannot provide further guidance for the repair process. In this paper, the fused silica damage samples were repaired layer by layer by the MR method. The number and size changes of all the surface damage, the morphology, the fluorescence area distribution, and photothermal-absorption value of a single typical small-scale damage were measured. Through dark field scattering imaging, it is found that when the repair depth is 5 μm, the repair completion rate of damage with a transverse size less than 50 μm can reach 44%, and the repair efficiency decreases gradually with the repair process. Focusing on the whole repair process of a single typical, small-scale damage—due to the flexible shear removal mechanism of the MR method—the repair process of damage can be divided into three stages, which as a whole is a top-down, from outside to inside process. The first stage is the process of removing the surface of the damage layer by layer. In this process, MR fluid will introduce pollution to the inside of the damage. In the second stage, MR fluid begins to repair the inside of the damage. In the third stage, the MR ribbon completely covers the inside of the damage, and the repair effect is the most obvious. The measurement results of photothermal absorption and fluorescence area distribution of damage confirm this process. The photothermal absorption value and fluorescence area distribution of damage do not simply decrease with the repair process. On the contrary, they gradually increase first, and then decrease significantly when the damage depth reaches less than 1 μm. As the thickness of the MR ribbon is 1 μm, the reduction in the photothermal absorption value and fluorescence area of the damage is due to the process of repairing the inside of the damage. The results show that the absorbent impurities inside the small-scale damage of fused silica are the main factor affecting the performance. The key to repairing the small-scale damage of fused silica by the MR method is that the damaged interior must be repaired effectively. This paper outlines the MR repair method of small-scale damage of fused silica, which is of great significance to optimize the MR repair process.

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“…[8,15,16] However, some problems, such as raised rims, re-deposited debris, bubbles or residual stress at the mitigated damage sites, may occur when using the non-evaporative mitigation protocol and they will lead to problematic damage re-initiation and growth, as well as downstream intensification. Extensive investigations have been conducted to solve these problems, [4,8,[15][16][17][18][19][20][21][22][23][24] and the non-evaporative mitigation protocol with the combination of particular powers and exposure times of CO 2 laser can effectively eliminate raised rims, re-deposited debris, and bubbles at the mitigated damage sites. [8,[15][16][17][18][19][20][21][22] In addition, high temperature oven annealing or laser annealing can effectively control the residual stress to an acceptable level.…”

Section: Introductionmentioning

confidence: 99%

“…Extensive investigations have been conducted to solve these problems, [4,8,[15][16][17][18][19][20][21][22][23][24] and the non-evaporative mitigation protocol with the combination of particular powers and exposure times of CO 2 laser can effectively eliminate raised rims, re-deposited debris, and bubbles at the mitigated damage sites. [8,[15][16][17][18][19][20][21][22] In addition, high temperature oven annealing or laser annealing can effectively control the residual stress to an acceptable level. [21][22][23][24] These modifications of the mitigated damage sites induced by intensive CO 2 laser treatment are associated with the local structural changes of fused silica.…”

Section: Introductionmentioning

confidence: 99%

ATR-FTIR spectroscopic studies on density changes of fused silica induced by localized CO ₂ laser treatment

Zhang

Liao

et al. 2015

Chinese Phys. B

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ATR-FTIR spectroscopic studies on density changes of fused silica induced by localized CO 2 laser treatmentZhang Chuan-Chao(张传超) a) , Zhang Li-Juan(张丽娟) a) , Liao Wei(廖威) a) , Yan Zhong-Hua(晏中华) b) , Chen Jing(陈静) a) † , Jiang Yi-Lan(蒋一岚) a) , Wang Hai-Jun(王海军) a) , Luan Xiao-Yu(栾晓雨) a) , Ye Ya-Yun(叶亚云) a) ‡ , Zheng Wan-Guo(郑万国) a) , and Yuan Xiao-Dong(袁晓东) a) a) Research Center of Laser Fusion,

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Irradiation effects of CO₂laser parameters on surface morphology of fused silica

Cited by 14 publications

References 23 publications

Laser-Induced Damage Initiation and Growth of Optical Materials

Laser-Induced Damage Initiation and Growth of Optical Materials

Layer-by-Layer Repair of Small-Scale Damage of Fused Silica Based on the Magnetorheological Method

ATR-FTIR spectroscopic studies on density changes of fused silica induced by localized CO ₂ laser treatment

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Irradiation effects of CO2laser parameters on surface morphology of fused silica

Cited by 14 publications

References 23 publications

Laser-Induced Damage Initiation and Growth of Optical Materials

Laser-Induced Damage Initiation and Growth of Optical Materials

Layer-by-Layer Repair of Small-Scale Damage of Fused Silica Based on the Magnetorheological Method

ATR-FTIR spectroscopic studies on density changes of fused silica induced by localized CO 2 laser treatment

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Irradiation effects of CO₂laser parameters on surface morphology of fused silica

ATR-FTIR spectroscopic studies on density changes of fused silica induced by localized CO ₂ laser treatment