Fe and N self-diffusion in non-magnetic Fe:N has been studied using neutron reflectivity. The isotope labelled multilayers, [Fe:N/ 57 Fe:N] 10 and [Fe:N/Fe 15 :N] 10 were prepared using magnetron sputtering. It was remarkable to observe that N diffusion was slower compared to Fe while the atomic size of Fe is larger compared to N. An attempt has been made to understand the diffusion of Fe and N in non-magnetic Fe:N.Iron nitrides (Fe:N) show a variety of structures and magnetic properties with a variation in the nitrogen content. With an increasing atomic percentage ( at. % N), their major phases are: Fe 16 N 2 , Fe 4 N, Fe 3 N, Fe 2 N, FeN and Fe 3 N 4 . For ≤25 at. % N, the Fe:N phases are magnetic. 1 A lot of attention has been driven to α ′′ − Fe 16 N 2 (∼11 at. % N) due to the presence of the so-called giant magnetic moment in this compound. 2,3 Around 20 at. % N, γ ′ − Fe 4 N phase is formed which has a well-defined magnetic properties and crystal structure. 4 Very recently the γ ′ phase has received a lot of interest due to its chemical inertness and mechanically hard surfaces making it a suitable alternative to pure Fe in magnetic devices. [4][5][6][7][8] Between 25-33 at. % N the Fe:N are known as ǫ − Fe x N (2 ≤ x ≤ 3), and as N at. % increases from 25% to 33%, the phase changes from ferromagnetic Fe 3 N to paramagnetic Fe 2 N at room temperature. Earlier it was not possible to produce the Fe:N phases containing more than 33 at. % N but by using reactive sputtering 9-11 and pulsed laser deposition techniques, 12 the Fe:N phases with >33 at. % N were produced. Around 50 at. % N, the FeN phases have cubic ZnS and/or NaCltype structures which are known as γ ′′ and/or γ ′′′ . The Fe 3 N 4 phase with even more than 50 at. % N was predicted by Ching et al. 13 , but has not been evidenced experimentally.Recently, the ǫ − Fe 2 N and γ ′′ /γ ′′′ phases have been used as a precursor to prepare γ ′ − Fe 4 N phase for its use in the spintronic devices. [5][6][7] In the present work, we have prepared single phase ǫ − Fe 2 N and γ ′′′ − FeN compounds and studied the self-diffusion of Fe and N. A proper understanding of the stability and nitride formation requires the knowledge of both Fe and N selfdiffusion at atomic length scales. However, there are no studies on measurements of both Fe and N self-diffusion in non-magnetic Fe:N. Conventional techniques to measure self-diffusion (e.g. secondary ion mass spectroscopy, radioactive tracer etc.) have depth resolutions of several a)