2012
DOI: 10.1039/c1dt11587a
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IR laser photodeposition of a-Fe/Si films developing nanograins of ferrisilicate, iron disilicide and rare hexagonal iron upon annealing

Abstract: IR laser-induced gas-phase photolysis of Fe(CO)(5)-SiH(4) mixtures occurs as SiH(4)-photosensitized decomposition of Fe(CO)(5) is accelerated by products of this decomposition and it results in deposition of amorphous Si/Fe nanocomposite films. Analyses of the deposited and subsequently annealed solid films were made by FTIR, Raman and X-ray photoelectron spectroscopy, X-ray diffraction and electron microscopy. The deposited films are amorphous, contain crystalline nanostructures of iron silicide FeSi(2) and u… Show more

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Cited by 5 publications
(2 citation statements)
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“…Similar laser-induced processes were, in fact, recently described by us [28,39,40,29] for laser deposition of rare metal nanostructures stabilized in polymer and carbonaceous amorphous phase.…”
Section: Resultsmentioning
confidence: 76%
“…Similar laser-induced processes were, in fact, recently described by us [28,39,40,29] for laser deposition of rare metal nanostructures stabilized in polymer and carbonaceous amorphous phase.…”
Section: Resultsmentioning
confidence: 76%
“…The single-pulseinduced processes were accomplished through laser ablation of Ag or Ga and simultaneous dielectric breakdown in hydrocarbon leading to formation of stabilizing carbonaceous phase [40,41], or through UV laser gas-phase silane-iron pentacarbonyl cophotolysis leading to photodeposition of Fe in amorphous Fe/Si phase [42].…”
Section: Introductionmentioning
confidence: 99%