Ionic-Liquid Lubrication of Sliding MEMS Contacts: Comparison of AFM Liquid Cell and Device-Level Tests

Nainaparampil, J. J.; Eapen, Kalathil C.; Sanders, J.H.; Voevodin, Andrey A.

doi:10.1109/jmems.2007.901628

Cited by 53 publications

(45 citation statements)

References 19 publications

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“…Regarding the use of ILs as neat lubricants, several studies have shown great potential for this purpose [16,20,[23][24][25][26][27][28]. However, the replacement of traditional base oils by ILs is currently limited by their cost, so their use as neat lubricant has been evaluated for special conditions (diesel engine, vacuum and MEMS applications) [29][30][31].…”

Section: Introductionmentioning

confidence: 99%

Phosphonium cation-based ionic liquids as neat lubricants: Physicochemical and tribological performance

Battez

Bartolomé

Blanco

et al. 2016

Tribology International

103

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Section: Introductionmentioning

confidence: 99%

Phosphonium cation-based ionic liquids as neat lubricants: Physicochemical and tribological performance

Battez

Bartolomé

Blanco

et al. 2016

Tribology International

103

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“…In the case of MEMS, it is particularly important to use surface layers or lubricants that are molecularly thick, easy applied, insensitive to environment and highly durable. Hence, one of the promising solutions is the ionic liquids [14][15][16]. On the other hand, numerous experiments have established that the water-lubricated ceramic interface provides a very low friction coefficient [17].…”

Section: Introductionmentioning

confidence: 99%

Influence of Alkali Ions on Tribological Properties of Silicon Surface

et al. 2015

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Tribological properties of surfaces (friction, adhesion and wear) provide challenging limitations to the design of reliable machines on the micro-and nanometer scale as the surface to volume area increases and volume, mass and inertia of the mobile parts decrease. This study reports on the reduction in the friction force of silicon surfaces after the alkali metal ion exposure in the form of aqueous solutions. A scanning force microscope equipped with a liquid cell was used to investigate the friction force and the pull-off force of a flat silicon surface immersed in water and in different alkali metal chlorides solutions: LiCl, NaCl and CsCl. The concentration ranged from 0.1 up to 1000 lmol/l. The changes in the free surface energy of the initial surface and of the modified surfaces after drying were determined from contact angle measurements and from the acid-base adhesion theory. In both cases, in the liquid environment and after drying of the exposed silicon substrates in air, the friction force is reduced by approximately 50 %. Our results provide new, fundamental insight into the exchange of surface termination layers in particular for tribology. Also it is suggested to use the procedure as a low-cost alternative to improve the tribological properties of the silicon surface in particular in applications where lubricating fluids are not appropriate, e.g., in nanomachines and devices.

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“…However, their relatively poor mechanical and tribological properties limit the dynamic range of MEMS applications especially for devices that require extensive sliding and rolling contacts such as micro-motors and micro-gears [5]. Proper lubrication schemes are imperatively needed to provide long contact endurance and acceptable reliability [7,8]. Different solid tribological coatings (e.g., high quality amorphous carbon) and thin films (e.g., organic self-assembled monolayers (SAMs)) have been extensively developed [9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

“…Different solid tribological coatings (e.g., high quality amorphous carbon) and thin films (e.g., organic self-assembled monolayers (SAMs)) have been extensively developed [9][10][11][12][13][14][15]. Nevertheless, these lubricant films still have shortcomings in spite of considerable progresses made, for instance, adherence, fluctuation in coefficient of friction (COF), finite wear life, tribo-reactivity, poor thermal conductivity and complex deposition procedures, etc., are the great challenges that the solid coating should face [16]; SAMs organic films may degrade by aging due to their chemistry changes in humid or oxidizing environments, volatility in vacuum environments, and sensitivity to temperature fluctuations [7,17].…”

Section: Introductionmentioning

confidence: 99%

“…Furthermore, their good electrical properties other than conventional insulating lubricants show the promising applications in MEMS besides the high temperature stability and excellent lubrication properties [26]. ILs lubrication has been demonstrated to be superior to traditional lubricants both by conventional tribological tests with different tribopairs [23][24][25][26][27][28][29][30][31] and atomic force microscopes (AFM) [7,26] and device-level tests [7]. Also, the tribological behaviors of thin IL films have been investigated recently by several groups [19,26,32,33].…”

Section: Introductionmentioning

confidence: 99%

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Tribological Characterization of Several Silicon-Based Materials Under Ionic-Liquids Lubrication

Xie

Wang

et al. 2009

Tribol Lett

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The tribological behaviors of three siliconbased materials (low temperature silicon oxide (LTO), polysilicon (Poly Si) and silicon nitride (Si 3 N 4 ) films) under ion liquids (ILs) lubrication have been investigated by varying the applied load and the sliding velocity. An atomic force microscope and a nanoindentor were used to characterize the deposited films, and the worn surfaces after frictional tests were analyzed by an optical microscope, a scanning electron microscope (SEM) with an energy dispersive spectrometer (EDS) and an X-ray photoelectron spectrometer (XPS). The results show the best lubricating properties of the IL lubricants are obtained at the intermediate load of 150 g for the three tribo-pairs. For the Si 3 N 4 /Si 3 N 4 tribo-pair, the coefficients of friction (COFs) and the wear rates under ILs lubrication are larger than those under dry friction. The COF values decrease with sliding velocity, and the COFs of the Si 3 N 4 /Si 3 N 4 tribo-pair are greater than the ones of the other two tribopairs (LTO/Si 3 N 4 and Poly Si/Si 3 N 4 ) at low velocities. The COF of 1-ethyl-3-methylimidazolium tetrafluoroborate is nearly 3 times larger than the other two IL lubricants (1-butyl-2,3-dimethylimidazolium tetrafluoroborate and N-butylpyridinium tetrafluoroborate) for the Si 3 N 4 /Si 3 N 4 tribo-pair. The differences in COFs between the latter two lubricants for the three tribo-pairs are negligible. Different mechanisms of these results have been analyzed in the paper.

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Ionic-Liquid Lubrication of Sliding MEMS Contacts: Comparison of AFM Liquid Cell and Device-Level Tests

Cited by 53 publications

References 19 publications

Phosphonium cation-based ionic liquids as neat lubricants: Physicochemical and tribological performance

Phosphonium cation-based ionic liquids as neat lubricants: Physicochemical and tribological performance

Influence of Alkali Ions on Tribological Properties of Silicon Surface

Tribological Characterization of Several Silicon-Based Materials Under Ionic-Liquids Lubrication

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