“…Ion-beam implantation/irradiation is an attractive method for the fabrication of waveguides and/or surface modification in many optical materials, including crystals, polymers, glassy materials, and semiconductors. − Ion-beam irradiation is also a versatile method for surface or near-surface modification of crystalline materials in the electronics, magnetoelectronics, and optoelectronics industries. − Recently, there has been considerable interest in modifying the optical properties of KTA and fabricating waveguides using ion-beam methods. ,,− However, the information concerning variations of electronic properties and the structure of KTA surfaces subjected to external physiochemical effects, such as ion bombardment, is limited. The ion-beam irradiation-induced modifications of the surface structure may result in significant variations of optical transparency, refractive indices, and optical damage thresholds.…”