Interface mixing of Al∕Fe and Fe∕Al bilayer systems and the role of Ti as a stabilizing interlayer using Rutherford backscattering spectrometry and x-ray reflectometry

Priyantha, W.; Chen, Hui; Kopczyk, M.; Smith, Richard J.; Kayani, A.; Comouth, A.; Finsterbusch, Martin; Nachimuthu, Ponnusamy; McCready, David E.

doi:10.1063/1.2829803

Cited by 7 publications

(6 citation statements)

References 19 publications

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“…49,50,57 The kinetics of intermixing are characterized by the irradiation dose dependence of the intermixing length squared, X 2 , according to the "compound formation model". 58,59 On this basis, Fig.…”

Section: Discussionmentioning

confidence: 99%

Study of focused-ion-beam–induced structural and compositional modifications in nanoscale bilayer systems by combined grazing incidence x ray reflectivity and fluorescence

Arac

Burn

Eastwood

et al. 2012

Journal of Applied Physics

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2012) 'Study of focused-ion-beaminduced structural and compositional modications in nanoscale bilayer systems by combined grazing incidence x ray reectivity and uorescence.', Journal of applied physics., 111 (4). 044324.Further information on publisher's website: Use policyThe full-text may be used and/or reproduced, and given to third parties in any format or medium, without prior permission or charge, for personal research or study, educational, or not-for-prot purposes provided that:• a full bibliographic reference is made to the original source • a link is made to the metadata record in DRO • the full-text is not changed in any way The full-text must not be sold in any format or medium without the formal permission of the copyright holders.Please consult the full DRO policy for further details. A detailed analysis of the structural and compositional changes in NiFe=Au bilayers induced by a focused ion beam (FIB) is presented. NiFe=Au bilayers with different thickness were irradiated with a focused 30 keV Ga þ ion beam, and the evaluation of the individual layers and interfaces were investigated systematically as a function of a broad range of irradiation fluence using grazing incidence x ray reflectivity (GIXRR) and angular dependent x ray fluorescence (ADXRF) techniques carried out at synchrotron radiation sources. Experimental data were collected from 1.3 mm Â 4.5 mm structures, and irradiation of such a broad areas with a 100-nm-wide focused ion beam is a challenging task. Two irradiation regimes were identified: For Ga þ fluences < 15.6 Â 10 14 ion=cm 2 (low dose regime), the main influence of the focused ion beam is on the interface and, beyond this dose (high dose regime), sputtering effects and ion implantation becomes significant, eventually causing amorphization of the bilayer system. The broadening of the NiFe=Au interface occurs even at the lowest dose, and above a critical fluence (U ¼ 1.56 Â 10 14 ion=cm 2 ) can be represented by an interfacial-intermixed layer (Ni x Fe y Au (1-x-y) ; x ¼ 0.5-0.6, y ¼ 0.1-0.15) formed between the NiFe and Au layers. The thickness of this layer increases with irradiation fluence in the low dose regime. A linear relationship is found between the squared intermixing length and irradiation fluence, indicating that FIB-induced mixing is diffusion controlled. The ballistic model fails to describe FIB-induced intermixing, indicating that thermodynamical factors, which might be originated from FIB specific features, should be taken into account. Despite the complexity of the chemical and structural formation, good agreement between the experiment and theory highlights the functionality of the combined GIXRR and ADXRF techniques for studying intermixing in high resolution. V C 2012 American Institute of Physics. [http://dx

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Section: Discussionmentioning

confidence: 99%

Study of focused-ion-beam–induced structural and compositional modifications in nanoscale bilayer systems by combined grazing incidence x ray reflectivity and fluorescence

Arac

Burn

Eastwood

et al. 2012

Journal of Applied Physics

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“…This tail was too large to be caused by double or plural scattering and the surface roughness was also too small to explain this phenomenon. Recently, similar asymmetry was found on Fe/Al versus Al/Fe bilayers, which elements are also immiscible [12].…”

Section: Introductionmentioning

confidence: 52%

Structural characterization of Fe/Ag bilayers by RBS and AFM

Tunyogi

Tanczikó

Osváth

et al. 2008

Nuclear Instruments and Methods in Physics Research Section B:

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“…27 In previous work we described an approach to stabilize the Fe-Al interface using a thin Ti͑ϳ15 Å͒ layer to reduce intermixing between Fe-Al at the interface. 13 In this work we test the stability of the Fe-Al interface with other stabilizing elements, namely V and Zr, and also test the effectiveness of extremely thin Ti interlayers ͑ϳ3 Å͒ for stabilizing the Fe-Al interface in sputtered polycrystalline films. Figure 4 shows the XRR specular scans and BEDE simulations of the Fe-Al interface with 3 Å thick Ti, 9 Å thick V, and 6 Å thick Zr interface stabilizing layers.…”

Section: Resultsmentioning

confidence: 99%

“…We reported that a thin Ti layer can be used to stabilize sputter deposited Fe-Al polycrystalline thin films grown on SiO 2 / Si wafers. 13 Model calculations using BFS quantum approximate methods were performed to identify other potential stabilizing layers for the Fe-Al system, and the results indicated that both Ti and V might be effective in this role. 14 We also decided to test Zr as an interlayer between Fe and Al because Ti and Zr have many chemical and physical similarities, but our model calculations did not predict that Zr would be effective as a stabilizing interlayer between Fe and Al.…”

Section: Introductionmentioning

confidence: 99%

Fe-Al interface intermixing and the role of Ti, V, and Zr as a stabilizing interlayer at the interface

Priyantha

Smith

Chen

et al. 2009

Journal of Applied Physics

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The chemical mixing at the "Al on Fe" and "Fe on Al" interfaces was studied by molecular dynamics simulations of the layer growth and by 57 Fe M€ ossbauer spectroscopy. The concentration distribution along the layer growth direction was calculated for different crystallographic orientations, and atomically sharp "Al on Fe" interfaces were found when Al grows over (001) and (110) oriented Fe layers. The Al/Fe(111) interface is also narrow as compared to the intermixing found at the "Fe on Al" interfaces for any orientation. Conversion electron M€ ossbauer measurements of trilayers-Al/ 57 Fe/Al and Al/ 57 Fe/Ag grown simultaneously over Si(111) substrate by vacuum evaporation-support the results of the molecular dynamics calculations. V C 2015 AIP Publishing LLC. [http://dx.

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Interface mixing of Al∕Fe and Fe∕Al bilayer systems and the role of Ti as a stabilizing interlayer using Rutherford backscattering spectrometry and x-ray reflectometry

Cited by 7 publications

References 19 publications

Study of focused-ion-beam–induced structural and compositional modifications in nanoscale bilayer systems by combined grazing incidence x ray reflectivity and fluorescence

Study of focused-ion-beam–induced structural and compositional modifications in nanoscale bilayer systems by combined grazing incidence x ray reflectivity and fluorescence

Structural characterization of Fe/Ag bilayers by RBS and AFM

Fe-Al interface intermixing and the role of Ti, V, and Zr as a stabilizing interlayer at the interface

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