The reactions of Si , SiH , SiH2 , and SiH3 with C2H2 and the reactions of C2H2 with SiH4 have been studied as a function of collision energy in the range of 0.3 to 2.5 eV in the center-of-mass system by tandem mass spectrometry. Phenomenologica l rate constants have been measured in the low-energy region of·0.3 to 0.9 eV in which the polarization theory cross-section dependence on energy of the