2019
DOI: 10.1007/978-3-030-00069-1_14
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Ion Microscopy

Abstract: received his PhD from the Montanuniversität Leoben in Austria in 2007. After moving to the University of Twente in 2009 he started to work with helium ion microscopy. He has been a Senior Scientist at the Helmholtz Zentrum Dresden Rossendorf since 2014. His research focuses on developing and extending the method of ion microscopy as well as applying it for defect engineering.

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Cited by 12 publications
(25 citation statements)
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“…A thin (<10 nm) layer of deposited carbon, primarily at the edges of the highest dosed features and common to such FIB processes, may also contribute to the image contrast (see Figure S2). The nanoscale features, discussed later, are processed with a single raster scan of the beam, which largely mitigates unwanted carbon deposition and yields reductions in the film height at the highest doses.…”
Section: Introductionmentioning
confidence: 99%
“…A thin (<10 nm) layer of deposited carbon, primarily at the edges of the highest dosed features and common to such FIB processes, may also contribute to the image contrast (see Figure S2). The nanoscale features, discussed later, are processed with a single raster scan of the beam, which largely mitigates unwanted carbon deposition and yields reductions in the film height at the highest doses.…”
Section: Introductionmentioning
confidence: 99%
“…Chemical Surface Distribution. The total number of pixels in the selected raw SIMS images (Figure 2b−f) was 512 × 512, which covered 72.25 μm 2 of the surface, and 40 Ca, 24 Mg, 27 Al, and 28 Si were measured. 40 Ca was detected within the analyzed surface covering a total area of 89.8%.…”
Section: ■ Resultsmentioning
confidence: 99%
“…The microscopy functionality is primarily based on the detection of the secondary electrons that are generated by the finely focused ion beam as it is scanned across the sample. Compared with the scanning electron microscope (SEM), the HIM offers enhanced surface sensitivity, greater topographic contrast, and a larger depth of field [ 4 5 ]. A charge-neutralization system based on flooding the scanned region with low-energy electrons also permits high-quality imaging of electrically insulating materials, such as biological samples, thus avoiding the need for conductive coatings that can introduce artifacts and obscure nanoscale surface features [ 6 7 ].…”
Section: Introductionmentioning
confidence: 99%
“…This has also opened the door to in situ materials analysis in the HIM using secondary ion mass spectrometry [ 8 ]. Further forms of materials analysis using the HIM include techniques based on the collection of backscattered helium ions and ionoluminescence [ 5 ].…”
Section: Introductionmentioning
confidence: 99%
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