Ion energy measurement at the powered electrode in an rf discharge

Kuypers, A. D.; Hopman, H. J.

doi:10.1063/1.339888

Cited by 73 publications

(42 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Several authors have utilized this compact design in a variety of reactors in various chemistries. 6,8,11,[14][15][16] The use of only two grids and a Faraday cup detector can lead to problems with secondary electron emission. This problem has been addressed by Ingram et al 5,10 and studies of the effects of secondary electron emission have been made by Bohm and Perrin in a four-grid electrostatic energy analyzer without differential pumping.…”

Section: Previous Workmentioning

confidence: 99%

“…11 Kuypers and Hopman were able to measure the ion energy distributions at the powered electrode in a multipole cylindrical discharge by using fiber optic cables for rf isolation. 6 The measurements of Janes and Huth were also at the powered electrode. 12,13 The analyzer described in this article was used to measure the ion energy distributions at the rf-biased electrostatic chuck of a Lam TCP reactor in Ar, Ne, Ar/Ne, O 2 , and O 2 /CF 4 discharges over a wide range of plasma operating parameters.…”

Section: Previous Workmentioning

confidence: 99%

See 1 more Smart Citation

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Edelberg

Perry

Benjamin

et al. 1999

Review of Scientific Instruments

View full text Add to dashboard Cite

Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode Rev. Sci. Instrum. 79, 033502 (2008); 10.1063/1.2890100 Measurement of ion energy distributions using a combined energy and mass analyzer Rev. Sci. Instrum. 78, 083503 (2007); 10.1063/1.2769352Ion energy distributions versus frequency and ion mass at the rf-biased electrode in an inductively driven discharge J.A compact floating retarding-field ion energy analyzer and the accompanying electronics have been designed and built to measure the energy distribution of ions bombarding radio-frequency ͑rf͒ biased electrodes in high-density plasma reactors. The design consists of two main components, a compact retarding field vacuum probe and an integrated stack of floating electronics for providing output voltages, measuring currents and voltages and transmitting data to a computer. The operation and capabilities of the energy analyzer are demonstrated through ion energy distribution measurements conducted on a 4 MHz rf-biased electrostatic chuck in a 13.56 MHz high-density transformer coupled plasma ͑TCP͒ reactor. The analyzer is capable of operating while floating on several hundreds of volts of rf bias and at pressures up to 30 mTorr without differential pumping. The effects of pressure ͑2-30 mTorr͒, TCP power ͑500-1500 W͒, rf-bias power ͑0-800 W͒, gas composition, and ion mass on the ion energy distributions are demonstrated through Ar, Ne, and Ar/Ne discharges.

show abstract

Section: Previous Workmentioning

confidence: 99%

Section: Previous Workmentioning

confidence: 99%

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Edelberg

Perry

Benjamin

et al. 1999

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

“…Besides this, retarding field energy analyzers (RFEAs) have been used extensively for determining the IED in plasma discharges in recent decades Coburn et al 1972, Kuypers et al 1988,Ingram et al 1990, Janes et al 1992, Charles et al 1992and 1993. The potential of a grid placed in front of a beam of ions is increased until the beam is stopped.…”

Section: Jnpsmentioning

confidence: 99%

Retarded Field Energy Analyzer as a tool to Study the Ion Velocity Distribution Functions on Radio Frequency Argon Plasma in Expanding Magnetic Field at Low Pressures

Mishra

2016

J. Nep. Pnys. Soc.

View full text Add to dashboard Cite

show abstract

“…There are two modes in this analysis, a dc mode and a rf mode. 2,3 In the dc mode, which is the usual mode, the electric potential of the IEA is constant in time. Therefore, a time-oscillating electric field exists between the rf electrode and the entrance of the IEA because the electric potential of the rf electrode is time oscillating.…”

mentioning

confidence: 99%