Ion bombardment-induced nanocrystallization of magnetron-sputtered chromium carbide thin films

Ziebert, Carlos; Ye, J.; Stüber, M.; Ulrich, S.; Edinger, Magnus; Barzen, I.

doi:10.1016/j.surfcoat.2011.04.080

Cited by 25 publications

(10 citation statements)

References 39 publications

(53 reference statements)

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“…This, together with the particular case of the steep increase in hardness of the material induced by the start of crystallization (at x=0.28 for series LC, and x=0.16 for series HC) proves that mechanical characteristics of the material, modulus, and hardness, depend more on the film structure than its composition. Similar type of significant hardening upon crystallization has been observed before by Ziebert et al for sputtered Cr-C films [14]. Differently from the binary Cr-C phases where hardness can be clearly correlated to the level of crystallization for the Cr-Ti-C films an increasing trend in hardness with the increasing level of crystallization is only detected for ternary LC films.…”

Section: Mechanical Propertiessupporting

confidence: 85%

“…For example, Ziebert et al have demonstrated that an increase in the ion flux during growth can lead to a change in growth mode from amorphous to nanocrystalline chromium carbide films [14]. An alternative approach can be to add a crystallization agent to reduce the tendency to form amorphous structures and, in principle, make it possible to control also the degree of crystallization.…”

Section: Introductionmentioning

confidence: 99%

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Control of crystallinity in sputtered Cr–Ti–C films

Furlan

Hultman

et al. 2013

Acta Materialia

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The influence of Ti content on crystallinity and bonding of Cr-Ti-C thin films deposited by magnetron sputtering have been studied by X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, and Raman spectroscopy. Our results show that binary Cr-C films without Ti exhibit an amorphous structure with two non-crystalline components;amorphous CrC x and amorphous C (a-C). The addition of 10-20 at% Ti leads to a crystallization of the amorphous CrC x and the formation of a metastable cubic (Cr 1-x Ti x )Cy phase. The observation was explained based on the tendency for formation of crystalline carbide films among the 3d transition metals. The mechanical properties of the films determined by nanoindentation and microindentation were found to be strongly dependent on the film composition in terms of hardness, elasticity modulus, H/E ratio, and crack development.

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Section: Mechanical Propertiessupporting

confidence: 85%

Section: Introductionmentioning

confidence: 99%

Control of crystallinity in sputtered Cr–Ti–C films

Furlan

Hultman

et al. 2013

Acta Materialia

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“…According to Su et al [17] and Jellad et al [18], sputtered Cr-C films can be of practical interest in abrasive and dry-sliding wear protection applications; in particular, Cr 3 C 2 presents excellent strength, hardness, and good corrosion-resistant properties [19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

A study of the wear performance of duplex treated commercial low-alloy steel against alumina and WC balls

Beliardouh¹,

Nouveau²,

Walock³

et al. 2014

Surface and Coatings Technology

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. The objective of this work is to study the improvement of the tribological properties of low alloy steel using a duplex treatment of low pressure carburizing and the deposition of a Cr-(WC-Co) coating by dual RF magnetron sputtering. The treatments result in a 500 μm thick carburized layer and a sputtered coating thickness of~2 μm. Tribological tests were made with a ball-on-disk tribometer under dry conditions with low load and low speed. The worn surfaces of the disk, the wear counterpart, and resulting debris were analyzed by X-ray diffraction, optical microscopy, optical profilometry, and a scanning electron microscope equipped with an energy-dispersive X-ray spectrometer. The wear performance of the samples was evaluated in terms of wear rates and friction coefficients during the sliding processes against two different counterparts. Experimental results have shown that sliding wear, of the investigated duplex treated low alloy steels, is strongly dependent on the counterface materials. Under testing conditions, the overall wear performance of a Cr-WC coating (Cr/W ratio of 1.12:1) deposited onto the surface of a carburized low alloy steel (0.61 wt.% C; HV = 654 ± 5) can be recommended as the best. The duplex-treated samples suffered severe, concentrated wear when against alumina. This wear is characterized by a combination of delamination, mild abrasion and oxidative wear. However, the wear mechanism seems to be oxidative and adhesive when against WC balls.

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“…The combination of chromium and carbon can synthesize various compounds, including metallic alloy, chromium carbides of different stoichiometric compositions, and carbon-based materials, which show different hardness, toughness, chemical stability, electrical conductivity, and tribological properties [1][2][3][4][5][6][7][8]. Metal-carbon thin films are easily synthesized via plasma-enhanced physical vapor depositions, such as cathodic arc ion plating [5,6,9], magnetron sputtering [10][11][12][13][14][15], electron-beam deposition [16,17], high-power impulse magnetron sputtering [12,[18][19][20], and a hybrid method [21]. The hardness of chromium carbide is varied up to ten times depending on the deposition processes [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Reactive High-Power Impulse Magnetron Sputtering of Chromium-Carbon Films

Kuo

Lin

Chang³

et al. 2020

Coatings

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Chromium-carbon films were deposited by utilizing reactive high-power impulse magnetron sputtering at different mixture ratios of ethyne and argon atmosphere, and different substrate bias voltages and deposition temperature, with the same pulse frequency, duty cycle, and average power. The microstructure and mechanical properties of the obtained films were compared. The films consist of amorphous or nanocrystalline chromium carbide, hydrogenated amorphous carbon, and minor α-chromium phase. Decreasing the fraction of ethyne increases the content of the α-chromium phase but decreases hydrogenated amorphous carbon phase. The film’s hardness increases by enhancing the negative substrate bias and raising the deposition temperature, which could be attributed to the increase of film density and the Hall–Petch strengthening effect induced by the nanoscale crystallization of the amorphous carbide phase.

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Ion bombardment-induced nanocrystallization of magnetron-sputtered chromium carbide thin films

Cited by 25 publications

References 39 publications

Control of crystallinity in sputtered Cr–Ti–C films

Control of crystallinity in sputtered Cr–Ti–C films

A study of the wear performance of duplex treated commercial low-alloy steel against alumina and WC balls

Reactive High-Power Impulse Magnetron Sputtering of Chromium-Carbon Films

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