Ion beam tools for nondestructive in-situ and in-operando composition analysis and modification of materials at the Tandem Laboratory in Uppsala

Abstract

Ion accelerators have demonstrated tremendous versatility in their research applications throughout several decades. Starting predominantly as nuclear physics tools, they subsequently provided novel insights into fundamental atomic physics. Nowadays small and medium size accelerators are routinely employed in several branches of materials science. As research questions increasingly drive the need for analyses and material modification experiments performed in-situ and/or in-operando, facilities must adapt to service such a need. In this work, we highlight capabilities for in-situ and in-operando composition depth profiling and materials modification, developed with instrumentation at the Tandem Laboratory at Uppsala University. An overview of available ion sources and accelerators is given. We then exemplify the specific capabilities of the available end stations for materials synthesis, sample modification and device operation either during simultaneous ion beam based characterization or with such characterization performed in-situ before and after the application of various modification steps. Describing specific recent examples and potential future applications, we illustrate the impact of the present national research infrastructure.

Yttrium incorporation in Cr2AlC: On the metastable phase formation and decomposition of (Cr,Y)2AlC MAX phase thin films

“…The chemical composition of the as‐deposited films was measured by ion beam analysis using a 5 MeV Tandem Accelerator at Uppsala University 50 . Time‐of‐flight elastic recoil detection analysis (ToF‐ERDA) and elastic backscattering spectrometry (EBS) were combined in order to enhance the measurement accuracy 51 .…”

“…The chemical composition of the as-deposited films was measured by ion beam analysis using a 5 MeV Tandem Accelerator at Uppsala University. 50 Time-of-flight elastic recoil detection analysis (ToF-ERDA) and elastic backscattering spectrometry (EBS) were combined in order to enhance the measurement accuracy. 51 For ToF-ERDA, a primary beam of 36 MeV 127 I 8+ was used, and recoils were detected at a forward angle of 45 • with an incidence angle of the primary beam and exit angle of the recoils both at 22.5 • .…”

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

“…Time-of-Flight Heavy Ion Recoil Detection Analysis (ToF-HIERDA) was performed employing the 5 MV 15-SDH-2 pelletron accelerator at Uppsala University 14 , where 36 MeV I 8+ ions served as probing particles, incident under 67.5° with respect to the surface normal. Recoiling target nuclei were detected in a time-of-flight (ToF-) telescope combined with a segmented gas ionization chamber 15 aligned 45° off the primary beam axis.…”

Accelerator techniques and nuclear data needs for ion beam analysis of wall materials in controlled fusion devices

“…There are six beamlines for standard IBA (PIXE, RBS, NRA and ToF ERDA with GIC detector [115]) and very specific tasks like 15 N NRA with a gamma detector, AMS used mainly in the 10 Be [86] and 14 C analyses, μ-beam with PIXE, RBS, NRA. A separate line is dedicated to material modification by ion irradiation, while the newly developed system on the sixth beamline is for in-situ and in-operando research: Set-up for In-situ Growth, Material modification and Analysis (SIGMA) [120,121].…”

“…Two other accelerating systems at Uppsala University further extend research on material modification [121]. With a 350 kV implanter (Danfysik) equipped with three change-Figure 5 SIGMA system shown from the both sides (a) and (b) of the apparatus: the vacuum chamber -1; viewing ports on both sides of the chamber -2 and 2'; triple evaporator -3; residual gas analyzer -4; sample manipulator -5; ion gun -6; load-lock chamber -7 able ion sources (gas, oven-based, sputter) the simulation of neutron-induced damage by means of light and heavy ion irradiation is carried on mirrors tested for diagnostic and heating systems in future fusion devices [116][117][118].…”