1995
DOI: 10.1016/0168-583x(95)00815-2
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Ion beam mixing and radiation enhanced diffusion in metal/ceramic interfaces

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Cited by 16 publications
(3 citation statements)
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“…No argon signals were even observed in the RBS spectra of as-deposited ZrO 2 films on grafoil (carbon) substrates. This is in contrast to the previously reported RBS measurements of ZrO 2 films made by IBAD [26] or the ion beam mixing process [25] with 10-150 keV Ar beam where the presence of argon can be easily found in their depth profile data.…”
Section: Resultscontrasting
confidence: 99%
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“…No argon signals were even observed in the RBS spectra of as-deposited ZrO 2 films on grafoil (carbon) substrates. This is in contrast to the previously reported RBS measurements of ZrO 2 films made by IBAD [26] or the ion beam mixing process [25] with 10-150 keV Ar beam where the presence of argon can be easily found in their depth profile data.…”
Section: Resultscontrasting
confidence: 99%
“…Optimization of the ion bombardment conditions can also modulate the morphology, density, stress level, crystallinity, and chemical composition of the as-produced fi lms with excellent adhesion to the substrates. IBAD has been previously applied and studied for ZrO 2 fi lm deposition [25,26] using argon ions in the kiloelectronvolt energy range which resulted apparently in non-stoichiometric opaque zirconia. We have also observed similar results in our laboratory when only Ar ions, especially with high energy ions and high current density, were used to fabricate ZrO 2 fi lms.…”
Section: Introductionmentioning
confidence: 99%
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