Microstructure analysis of ion beam-induced surface nanostructuring of thin Au film deposited on SiO2 glass

Meng, Xuan; Shibayama, Tamaki; Yu, Ruixuan; Takayanagi, Shinya; Watanabe, Seiichi

doi:10.1007/s10853-012-6816-1

Cited by 21 publications

(27 citation statements)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As a result, the Au thin films take on the properties of the liquid state, and dewetting of the films occurs. 14,15,[17][18][19][20][21][22][23] At the beginning of dewetting, holes grow on the surface of the thin film, and continues to expand. Generally, grain boundaries play an important role in hole formation.…”

Section: Discussionmentioning

confidence: 99%

“…By tuning the LSPR frequency using these factors, metallic nanoparticle/dielectric systems can be devised for applications such as biosensors, [5][6][7][8][9][10][11] plasmonic waveguides, 12 and photocatalysts. 13 Metallic nanostructures can be prepared on the surface of metallic thin films deposited on dielectric or semiconductor substrates via irradiation of the surface with a quantum beam such as an ion beam, [14][15][16][17][18][19][20][21][22][23] nanosecond-pulsed laser, 24,25 or electron beam. 26 Surface nanostructures are formed by dewetting caused by irradiation with a quantum beam.…”

mentioning

confidence: 99%

“…26 Surface nanostructures are formed by dewetting caused by irradiation with a quantum beam. [14][15][16][17][18][19][20][21][22][23][24][25][26] Under ion irradiation, metal nanoparticles that form on the surface through the dewetting process become embedded in SiO 2 glass 21,23 and Al 2 O 3 22 substrates because the viscosity of the substrate changes and it undergoes plastic flow during ion irradiation. 16,19 Laser-induced periodic surface structures (LIPSS) can be obtained via nanosecond-pulsed laser irradiation.…”

mentioning

confidence: 99%

See 2 more Smart Citations

Effects of ion and nanosecond-pulsed laser co-irradiation on the surface nanostructure of Au thin films on SiO2 glass substrates

Shibayama

Meng

et al. 2014

Journal of Applied Physics

Self Cite

View full text Add to dashboard Cite

Ion irradiation synthesis of Ag-Au bimetallic nanospheroids in SiO2 glass substrate with tunable surface plasmon resonance frequency J. Appl. Phys. 114, 054308 (2013) Ion irradiation and short-pulsed laser irradiation can be used to form nanostructures on the surfaces of substrates. This work investigates the synergistic effects of ion and nanosecond-pulsed laser co-irradiation on surface nanostructuring of Au thin films deposited under vacuum on SiO 2 glass substrates. Gold nanoparticles are randomly formed on the surface of the substrate after nanosecond-pulsed laser irradiation under vacuum at a wavelength of 532 nm with a repetition rate of 10 Hz and laser energy density of 0.124 kJ/m 2 . Gold nanoparticles are also randomly formed on the substrate after 100-keV Ar þ ion irradiation at doses of up to 3.8 Â 10 15 ions/cm 2 , and nearly all of these nanoparticles are fully embedded in the substrate. With increasing ion irradiation dose (number of incident laser pulses), the mean diameter of the Au nanoparticles decreases (increases). However, Au nanoparticles are only formed in a periodic surface arrangement after co-irradiation with 6000 laser pulses and 3.8 Â 10 15 ions/cm 2 . The periodic distance is $540 nm, which is close to the wavelength of the nanosecond-pulsed laser, and the mean diameter of the Au nanoparticles remains at $20 nm with a relatively narrow distribution. The photoabsorption peaks of the ion-or nanosecond-pulsed laser-irradiated samples clearly correspond to the mean diameter of Au nanoparticles. Conversely, the photoabsorption peaks for the co-irradiated samples do not depend on the mean nanoparticle diameter. This lack of dependence is likely caused by the periodic nanostructure formed on the surface by the synergistic effects of co-irradiation. V C 2014 AIP Publishing LLC.

show abstract

Section: Discussionmentioning

confidence: 99%

mentioning

confidence: 99%

mentioning

confidence: 99%

See 1 more Smart Citation

Effects of ion and nanosecond-pulsed laser co-irradiation on the surface nanostructure of Au thin films on SiO2 glass substrates

Shibayama

Meng

et al. 2014

Journal of Applied Physics

Self Cite

View full text Add to dashboard Cite

show abstract

“…Therefore, ion beam mixing attracts much attention for their ability to produce ion modified materials with higher solute concentrations at lower irradiation fluences than can be achieved with conventional high-fluence implantation techniques. At the same time, the energy deposition for the energetic ion can effectively induce mass transfer and result in irradiation-enhanced diffusion [16][17][18][19][20][21][22]. This diffusion will lead to the lateral transport of metal atoms, and therefore the spinodal dewetting of thin metal films [21].…”

Section: Introductionmentioning

confidence: 99%

“…Previously, we have synthesized single-layer gold nanoballs with a narrowed size distribution which were partially embedded in SiO 2 glass [22]. In this study, an Ar-ion irradiation process was adopted for the synthesis of gold-silver bimetallic nanoballs on Al 2 O 3 substrates.…”

Section: Introductionmentioning

confidence: 99%

Shift of localized surface plasmon resonance by Ar-ion irradiation of Ag–Au bimetallic films deposited on Al2O3 single crystals

Meng

Shibayama

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

Self Cite

View full text Add to dashboard Cite

Effects of Ar-ion induced surface nanostructuring were studied using 100 keV Ar-ion irradiation of 30 nm Ag-Au bimetallic films deposited on Al 2 O 3 single crystals, under irradiation fluences ranging from 5.0 × 10 15 cm -2 to 6.3 × 10 16 cm -2 . Scanning electron microscope was used to study the ionbeam-induced surface nanostructuring. As the irradiation fluence increased, dewetting of the bimetallic films on the Al 2 O 3 substrate was observed, and formation of isolated Ag-Au nanostructures sustained on the substrate were obtained. Next, thermal annealing was performed under high vacuum at 1073 K for 2 hours; a layer of photosensitive Ag-Au alloy nanoballs partially embedded in the Al 2 O 3 substrate was obtained when higher fluence irradiation (> 3.8 × 10 16 cm -2 ) was used. The microstructures of the nanoballs were investigated using a transmission electron microscope, and the nanoballs were found to be single crystals with a FCC structure. In addition, photoabsorption spectra were measured, and localized surface plasmon resonance peaks were observed. With increase in the irradiation fluence, the size of the Ag-Au nanoballs on the substrate decreased, and a blue-shift of the LSPR peaks was observed. Further control of the LSPR frequency over a wide range was achieved by modifying the chemical components, and a red-shift of the LSPR peaks was observed as the Au concentration increased. In summary, ion irradiation is an effective approach toward surface nanostructuring, and the nanocomposites obtained have potential applications in optical devices.

show abstract

Controlled dewetting as fabrication and patterning strategy for metal nanostructures

Ruffino

Grimaldi

2015

Phys. Status Solidi A

View full text Add to dashboard Cite

Metal thin films and metal nanostructures find a key role in the actual nanotechnology revolution. They can be engineered for nanoelectronics, plasmonics, and sensing applications. However, the crucial step toward reliable technological applications of metal‐based nanodevices is the development of simple, low cost, versatile, and high‐throughout nanofabrication methodologies. In general, top‐down nanofabrication approaches allow a minimum size of the single nanostructure higher than 10 nm, a high control on spatial regularity and size of the nanostructures, but involve high cost and long processing time. In contrast, bottom‐up approaches allow a minimum size of the single nanostructure lower than 10 nm, a low control on spatial regularity and size of the nanostructures, but involve low cost and short processing time. In this paper, the controlled dewetting process of thin metal films on surfaces is reviewed as a patterning and nanofabrication method for metal‐based nanocomposites, crossing the strenghts of both approaches.

show abstract

Microstructure analysis of ion beam-induced surface nanostructuring of thin Au film deposited on SiO2 glass

Cited by 21 publications

References 26 publications

Effects of ion and nanosecond-pulsed laser co-irradiation on the surface nanostructure of Au thin films on SiO2 glass substrates

Effects of ion and nanosecond-pulsed laser co-irradiation on the surface nanostructure of Au thin films on SiO2 glass substrates

Shift of localized surface plasmon resonance by Ar-ion irradiation of Ag–Au bimetallic films deposited on Al2O3 single crystals

Controlled dewetting as fabrication and patterning strategy for metal nanostructures

Contact Info

Product

Resources

About