Ion beam analysis of aluminium in thin layers

Differential cross-sections for nuclear reactions on Al and Si induced by deuterons at low energy (1–2MeV)

“…The first cross-section curves for aluminium and silicon were respectively measured by Gadioli et al [1] and by Wildenthal et al [2] at 135°. Since that time, very few studies have been published [1][2][3][4][5][6][7][8][9][10][11][12]. For silicon, papers report investigations based on c-ray detection from the (d,pc) reactions [3], or studies at high energy (>2 MeV) [2,8].…”

“…For silicon, papers report investigations based on c-ray detection from the (d,pc) reactions [3], or studies at high energy (>2 MeV) [2,8]. For aluminium, both reactions at high energy [4][5][6] or at two different detection angles (173° [9] and 90° [10]) were studied. More recently, new data from Gurbich and Molodtsov have been introduced in IBANDL [12].…”

Aluminium incorporation in AlxGa1−xN/GaN heterostructures: A comparative study by ion beam analysis and X-ray diffraction

“…However, Al determination by RBS is not easy when heavier elements are present in the matrix, such as Ga, due to signal overlapping. This drawback can be overcome with non-Rutherford or nuclear reaction analysis [15], although the analysis become more complex and a precise knowledge of the scattering crosssection is needed. Heavy-ion elastic recoil detection analysis (HI-ERD) with time-of-flight or ionisation chamber detectors presents mass or Z-resolved signals, respectively, and can alternatively be used to increase the Al sensitivity due to the lack of signal overlap [12].…”

Measurement of (d,p) and (d,α) differential cross-sections for aluminum

“…Further development of different methods including Rutherford backscattering (RBS), proton induced gamma-ray emission (PIGE) and nuclear reaction analysis (NRA) was recently reported for aluminum depth profile in different samples [1][2][3]. In many applications the aluminum content has to be determined for relatively thick layers but application of proton backscattering method which is generally the most suitable for such a case is complicated by the strong resonance structure of the proton elastic scattering cross-section.…”

“…The advantages of NRA with deuteron induced reactions for aluminum analysis were considered in detail in [3]. However, the analysis of the available information on the cross-sections for these reactions which are of crucial importance for simulation of the NRA spectra reveals significant discrepancies between different sets of experimental data.…”