Investigations of ZnO thin films grown on c‐Al2O3 by pulsed laser deposition in N2 + O2 ambient

Rogers, David J.; Téherani, F. Hosseini; Minder, K.; Razeghi, Manijeh; Largeteau, Alain; Demazeau, G.; Morrod, J. K.; Prior, K. A.; Lusson, A.; Hassani, Saïd

doi:10.1002/pssc.200779315

Cited by 16 publications

(10 citation statements)

References 11 publications

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“…The 270 nm thick ZnO layer was deposited by pulsed laser deposition method on c-Al 2 O 3 substrate in N 2 /O 2 atmosphere [9]. The electron beam written seed pattern for the growth was created by a JEOL JSM-IC848 scanning electron microscope in which the electron beam is controlled by Elphy Quantum 4.0 (Raith) system.…”

Section: Methodsmentioning

confidence: 99%

Highly ordered three‐dimensional ZnO nanorods for novel photonic devices

Szabó

Erdélyi

Makai

et al. 2011

Phys. Status Solidi C

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On‐purpose positioned epitaxial ZnO nanorods were grown on transparent substrate by wet chemical method. The high degree of vertical alignment can be ascribed to the epitaxial ZnO seed film deposited on a c‐plane sapphire substrate. The diffraction pattern taken on the array reveals the two‐dimensional ordering of the nanorods while the transmittance measurement showed high transparency. Both optical measurements were compared with three‐dimensional finite‐difference time‐domain simulations. The realized model structure promises novel applications such as three‐dimensional solar cells and photodetectors. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Section: Methodsmentioning

confidence: 99%

Highly ordered three‐dimensional ZnO nanorods for novel photonic devices

Szabó

Erdélyi

Makai

et al. 2011

Phys. Status Solidi C

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“…Substrates of Si (111) and c‐plane sapphire (c‐Al 2 O 3 ) were used for the growth of the ZnO nanostructures. The samples were grown by PLD from a 99.99% pure ZnO target using a KrF excimer laser (248 nm) as described elsewhere 3–5. The sample morphology was studied using a Hitachi S4800 field emission‐SEM.…”

Section: Methodsmentioning

confidence: 99%

“…During the last decade, zinc oxide nanostructures have been extensively studied due to their potential relevance in optoelectronics, spintronics and bio‐applications 1. Pulsed laser deposition (PLD) is recognized as one of the most powerful techniques for the growth of ZnO‐based thin films and it has recently shown a tendency for the growth of self‐organizing ZnO‐based nanostructures arrays 1–3. In previous studies 4, it was found that self‐forming arrays of vertically aligned nanocolumns and nanocones can be grown by PLD under optimized growth conditions.…”

Section: Introductionmentioning

confidence: 99%

Morphological and optical studies of self-forming ZnO nanocolumn and nanocone arrays grown by PLD on various substrates

Peres

Soares

Neves

et al. 2010

phys. stat. sol. (b)

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351 234 378 197 ZnO nanostructures were grown by pulsed laser deposition on c-sapphire, Si (111) (n-type and p-type) and analysed using morphological and optical techniques. Under optimized growth conditions, self-forming arrays of vertically aligned nanostructures were obtained. Scanning electron microscopy studies revealed two main structures: nanocolumns and a 'moth-eye type' array of nanocones, which gave a graded effective refractive index. X-ray diffraction measurements indicate that both types of structures are highly oriented along the c-axis. The optical properties were investigated using low temperature photoluminescence (PL) and room temperature (RT) reflection measurements. Low temperature PL spectra for nanocolumns grown on sapphire and n-type Si showed an emission which is similar to that observed for bulk ZnO with a spectrum dominated by donor bound exciton recombination at 3.36 eV and a structured green band. The PL intensity was particularly enhanced for nanocone structures grown on cubic Si substrates. For these samples, additional features, which are not observed for bulk ZnO were observed at 3.12, 3.02 and 2.92 eV following a vibronic progression of 100 meV. RT angular-dependent specular reflection measurements indicated that all the nanostructures act as highly effective broadband antireflection coatings.

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“…The strains in the in-plane directions are considered to be generated from the anisotropic lattice matching and thermal contraction of the sapphire substrate. In order to prepare the substrate [110]. Novel Aurora PLD method was also developed by applying substrate temperature and enhance the photoluminescence [111,112].…”

Section: Growth Of Zno Thin Filmsmentioning

confidence: 99%

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Peng¹,

Luo²,

Fu³

2018

Functional Materials and Electronics

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Progress in ZnO thin films and nanostructures for the acoustic wave microfluidic and sensing applications are reviewed in this chapter. ZnO thin films with good piezoelectric properties possess large electromechanical coupling coefficients and can be fabricated for the surface acoustic wave (SAW) and film-bulk acoustic resonator (FBAR) devices with a good acoustic performance. The SAWs can be excited to mix, stream, pump, eject, and atomize the liquid, and precision sensing can be performed using SAWs and FBARs. Therefore, the ZnO SAW devices are attractive to be integrated into a labon-chip system where the SAWs can transport bio-fluids to the desired area, mix the extracted DNA or proteins, and detect the changes of the signals using SAWs or FBARs. The ZnO SAW and FBAR devices in combination with different sensing layers could also be used to successfully detect gas, UV light, and biochemicals with remarkable sensitivities. 5.1 INTRODUCTION Zinc oxide (ZnO) is a binary compound via a covalent bonding between the transition-metal zinc atom and oxygen atom. ZnO thin films and nanostructures are multifunctional materials, which have attracted much attention from as early as 1930s until today due to various fundamental electronic, years, the development of new growth technologies of ZnO thin films and nanostructures and their new applications has renewed lots of interest on investigation of their growth mechanism, band structures, excitons, and deep centers in luminescence, nonlinear optics, and UV lasing [8,9]. With in-depth understanding of the semiconducting, optical, electronic, piezoelectric, and pyroelectric properties, ZnO has now been widely applied for microfluidics, These immense applications also have boosted the extensive researches on the fundamentals and growth techniques of the ZnO-based materials. typically at micron and submicron dimensions in a miniaturized system and the corresponding technologies for such systems. This multidisciplinary technology is comprehensively based on physics, nanotechnology, biotech-ZnO Thin Films and Nanostructures for Acoustic 197 the developments of the inkjet print-heads, DNA chips, and lab-on-a-chip is conveniently handled through generating, transporting, separating, consumption, high-throughput, compactness, high sensitivity, fast response, at microscale has been supported with the urgent needs from healthcare, medical research, life science, drug-development sectors. However, the and phenomena become dominant at a microscale level, such as capillary forces, surface roughness and undesired chemical interactions. These may be

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Investigations of ZnO thin films grown on c‐Al₂O₃ by pulsed laser deposition in N₂ + O₂ ambient

Cited by 16 publications

References 11 publications

Highly ordered three‐dimensional ZnO nanorods for novel photonic devices

Highly ordered three‐dimensional ZnO nanorods for novel photonic devices

Morphological and optical studies of self-forming ZnO nanocolumn and nanocone arrays grown by PLD on various substrates

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

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