2022
DOI: 10.1039/d1dt03365d
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Investigations into the structure, reactivity, and AACVD of aluminium and gallium amidoenoate complexes

Abstract: Amidoenoate complexes of Al and Ga have been synthesised and their coordination chemistry studied in relation to precursor stability. A selection of the complexes were used in aerosol assisted CVD to deposit thin films of Al2O3 and Ga2O3.

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Cited by 3 publications
(3 citation statements)
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References 67 publications
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“…For single source precursors, it has been stipulated that the oxygen content in the film can be controlled by the weight % of oxygen in the precursor. [6,27] From a precursor design perspective, this relationship can be easily investigated by changing the elemental composition of the ligand and observing the effects of this on the properties of the resultant films. However, estimating oxygen content of films deposited on glass is difficult as oxygen content calculated from analytical techniques also takes into account the oxygen content of the substrate.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…For single source precursors, it has been stipulated that the oxygen content in the film can be controlled by the weight % of oxygen in the precursor. [6,27] From a precursor design perspective, this relationship can be easily investigated by changing the elemental composition of the ligand and observing the effects of this on the properties of the resultant films. However, estimating oxygen content of films deposited on glass is difficult as oxygen content calculated from analytical techniques also takes into account the oxygen content of the substrate.…”
Section: Introductionmentioning
confidence: 99%
“…For oxide materials, oxygen content of the films can have large effects on optoelectronic properties and finding a way to control this on a molecular level is the basis of good precursor design. For single source precursors, it has been stipulated that the oxygen content in the film can be controlled by the weight% of oxygen in the precursor [6,27] . From a precursor design perspective, this relationship can be easily investigated by changing the elemental composition of the ligand and observing the effects of this on the properties of the resultant films.…”
Section: Introductionmentioning
confidence: 99%
“…Much research is being carried out in the search for suitable deposition precursors and methods for functional materials that pose challenges due to their peculiar chemical properties such as geometry, reactivity, solubility e.t.c. [7,[13][14][15][16][17][18][19][20][21][22]. There is growing interest in special-group functionalized polymers, which ample literature evidence suggests are strong candidates for opto-electronics applications [23][24][25][26].…”
Section: Introductionmentioning
confidence: 99%