Investigation on material removal efficiency in debris-free laser ablation of brittle substrates

Wang, Z.K.; Seow, W. L.; Wang, X.C.

doi:10.1016/j.jmatprotec.2014.12.013

Cited by 18 publications

(7 citation statements)

References 18 publications

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“…The SEM images of the eight channels are illustrated in figure 5. For the channels produced in gas, the cross-section profiles were characterised as having a sharp V-shape with the walls that were remelted associated with debris recast, as highlighted in (a-c), which is a common profile in laser beam machining [32,33]. As for the underwater laser machining, static water led to the channels being even wider and shallower accompanied by a higher degree of roughness than the channel machined in flowing water.…”

Section: Effects Of Machining Conditionsmentioning

confidence: 99%

Underwater laser micro-milling of fine-grained aluminium and the process modelling by machine learning

Feng¹,

Guo²,

Yan³

et al. 2020

J. Micromech. Microeng.

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Nanosecond-pulsed laser ablation is often accompanied by adverse thermal effects, such as oxidation, debris recast and burr formation. To reduce these effects, in this paper, the authors present the underwater laser milling process using RSA-905 fine-grained aluminium as the target material for the first time. The results show that channels up to 200 μm in width, 700 μm depth and bottom roughness around 1 µm Ra could be fabricated with reduced thermal effects. By conducting multi- and single-factor experiments, empirical models relating the laser processing parameters to the key dimensions of channels were derived using an artificial neural network algorithm and polynomial regression, and the models’ accuracies were evaluated. Based on the models, the cross-section profile of a channel subject to a given set of processing parameters can be predicted. The process can serve as a pre-treatment technique in mechanical milling such that the tool life will be extended and the profile of a desired feature can be precisely defined.

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Section: Effects Of Machining Conditionsmentioning

confidence: 99%

Underwater laser micro-milling of fine-grained aluminium and the process modelling by machine learning

Feng¹,

Guo²,

Yan³

et al. 2020

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…However, the hardness and brittleness of glass dampens its microfabrication. To achieve better processing quality and efficiency, scholars from various countries have developed many processing methods in recent years, including laser processing [1][2][3], chemical etching [4], ultrasonic processing [5] and so on. Laser processing can micro-process hard and brittle materials with high efficiency.…”

Section: Introductionmentioning

confidence: 99%

Influence of Electrochemical Discharge Machining Parameters on Machining Quality of Microstructure

Zhao

Zhu

Zhang

et al. 2021

Preprint

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As a nontraditional processing technology, Electrochemical discharge machining (ECDM) can precisely process glass and engineering ceramics. This technology has proven to be a potential process for glass 3D microstructure. However, the key to expanding the application of ECDM is how to improve machining accuracy. This research conducted micro-hole and microgroove machining. The influence of power voltage and frequency on hole processing efficiency, hole entrance diameter and hole limit depth explored. We considered four factors affecting ECDM–the voltage and frequency of the pulse power supply, the tool electrode feed rate, and the rotation speed. We studied their influence on the roughness of the microgrooves. The results show that machining efficiency, entrance diameter and limit depth of micro-holes increased with the increase in voltage, but decreased with the increase in power frequency. The results show that the roughness of microgrooves has an obvious positive correlation with the power voltage, while it had an obvious negative correlation with the power frequency and the electrode speed. The bottom surface roughness of microgrooves can be as small as 0.605µm. Various complex 3D microstructures on the glass surface by layer-by-layer method, which proved the great potential of ECDM.

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“…In this case, ultrashort pulsed laser ablation shows big advantages [11]. It has been further disclosed on how to improve the laser ablation efficiency [12].…”

Section: Introductionmentioning

confidence: 99%

Separation of Surface Hardened Glass with Non-ablation Laser Technique

Wang¹

2018

AJMSP

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The study investigated cutting of glass by non-laser ablation technique through non-linear absorption laser pulses induced optical breakdown, melting and plasma expansion throughout the glass thickness from bottom to top. Picosecond near-infrared laser pulses were used. The laser beam was focused with an objective lens with numerical aperture (NA) of 0.1 which produced a spot size of 19.6 µm in diameter. The study revealed that focus position is a key factor in determining glass well-separation. When the laser focus was placed at 500 µm below the top surface for a 700 µm thick ion exchanged Gorilla glass, namely more than half of the glass thickness, the glass could be well-separated into two pieces. At focus near the top surface, V-shaped ablation grooves were generated at the glass top surface without glass separation. At focus inside the glass and near to the bottom surface, internal scribing occurred at the bottom part of the glass. The glass could also be separated by scribing-caused cracking throughout the glass entire thickness. At the optimal focus ranges, well-separation of the glass was found to be at speeds of 0.5-6 mm/s and pulse frequency around 200 KHz with laser fuence of 0.87 J/cm 2. At low pulse frequencies such as below 100 KHz, glass top surface was ablated without glass separation. At higher pulse frequencies above 300 KHz, cracks were produced and the glass was separated into multiple pieces. Interestingly, at pulse frequency upto 500 KHz, both top surface ablation and bottom surface ablation occurred. Eventually, the glass was cracked into multiple pieces. Different pulse frequency produces different pulse energy. For example, 200 KHz generates a laser fluence of 0.87 J/cm 2 at the glass top surface, 100 KHz for 1.59 J/cm 2 and 300 KHz for 0.60 J/cm 2 etc. Furthermore, the glass was cracked at high speeds above 10 mm/s. The results indicate that there is an optimal time-dependent energy deposition, namely, laser energy deposition rate for glass well-separation. The calculation shows that the energy deposition rates were between 1.29×10 4 µw/µm 3 to 1.54×10 5 µw/µm 3 .

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Investigation on material removal efficiency in debris-free laser ablation of brittle substrates

Cited by 18 publications

References 18 publications

Underwater laser micro-milling of fine-grained aluminium and the process modelling by machine learning

Underwater laser micro-milling of fine-grained aluminium and the process modelling by machine learning

Influence of Electrochemical Discharge Machining Parameters on Machining Quality of Microstructure

Separation of Surface Hardened Glass with Non-ablation Laser Technique

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