Investigation on marginal failure characteristics and related defects analysed by soft defect localization

Hartmann, Claus; Wieberneit, M.

doi:10.1016/j.microrel.2009.07.036

Cited by 1 publication

(1 citation statement)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Sample 2 had a fail in the scan chain pattern [17]. For automatic test equipment (ATE), shmoo test [18] showed that the failure phenomenon was not changed with temperature, frequency or voltage. No valuable information on this failure was obtained from the diagnosis on the failed data log of the ATE.…”

Section: Missing Ingaas Photon Emission Spotmentioning

confidence: 99%

Open circuit defect positioning method based on dynamic photon emission microscopy and schematic analysis for mixed signal IC on SOI

Lan¹,

Wen²,

Wei³

et al. 2022

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

Failure analysis (FA) was encountered ion charging risk when using focused ion beam (FIB) to insert extra test pads for mixed signal integrated circuits (IC) on silicon-on-insulator (SOI). To overcome this challenge and to precisely locate the open circuit defect, this paper described an effective non-destructive FA method based on dynamic InGaAs photon emission microscopy and schematic/layout analysis to determine the open circuit type and position. Nano-probing and electron beam absorbed current (EBAC) was used to located the precise location of the open circuit defect. Two typical samples of mixed signal IC on SOI were used as examples (Sample 1 and 2, with extra and missing emission spots, respectively) to illustrate the analysis procedure and effectiveness for the proposed method. Scanning electron microscope (SEM) results were presented to verify the accuracy of this method. It was demonstrated that the proposed method was able to accurately determine failure of open circuit efficiently without microprobe for mixed signal IC on SOI.

show abstract

Section: Missing Ingaas Photon Emission Spotmentioning

confidence: 99%