Investigation of the SiC thin films synthetized by Thermionic Vacuum Arc method (TVA)

Ciupină, V.; Vladoiu, R.; Lungu, C.P.; Dinca, Virginia; Contulov, M.; Mandes, Aurelia; Popov, P. S.; Prodan, G.

doi:10.1140/epjd/e2012-20470-5

Cited by 29 publications

(15 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Because the discharge sustaining gas is just the evaporating atoms in a vacuum without any other inert buffer gas, the thin film deposition is carried out in high purity conditions. More details are presented elsewhere [30][31][32]. In this way, it is possible to meaningfully refine the quality of the surfaces coated with different materials.…”

Section: Methodsmentioning

confidence: 99%

The Properties of Binary and Ternary Ti Based Coatings Produced by Thermionic Vacuum Arc (TVA) Technology

et al. 2018

View full text Add to dashboard Cite

A series of the multicomponent thin films (binary: Ti-C; Ti-Ag and ternary: Ti-C-Ag; Ti-C-Al) were fabricated by Thermionic Vacuum Arc (TVA) technology in order to study the wear resistance and the anticorrosion properties. The effects of Ti amount on the microstructure, tribological and morphological properties were subsequently investigated. TVA is an original deposition method using a combination of anodic arc and electron gun systems for the growth of films. The samples were characterized using scanning electron microscope (SEM) and a transmission electron microscope (TEM) accompanied by selected area electron diffraction (SAED). Tribological properties were studied by a ball-on-disc tribometer in the dry regime and the wettability was assessed by measuring the contact angle with the See System apparatus. Wear Rate results indicate an improved sliding wear behavior for Ti-C-Ag: 1.31 × 10 −7 mm 3 /N m (F = 2 N) compared to Ti-C-Al coating wear rate: 4.24 × 10 −7 mm 3 /N m. On the other hand, by increasing the normal load to 3 N an increase to the wear rate was observed for Ti-C-Ag: 2.58 × 10 −5 mm 3 compared to 2.33 × 10 −6 mm 3 for Ti-C-Al coating.

show abstract

Section: Methodsmentioning

confidence: 99%

The Properties of Binary and Ternary Ti Based Coatings Produced by Thermionic Vacuum Arc (TVA) Technology

et al. 2018

View full text Add to dashboard Cite

show abstract

“…In this study, we synthesized titanium-based nanocomposite layers-titanium and silver (TiAg) and titanium and carbon (TiC)-on glass, on a silicon (Si) wafer, and a special substrate with a great interest for industrial applications, OLC45-meaning high-quality stainless steel with 0.45% carbon-using the Thermionic Vacuum Arc (TVA) method. This procedure combines the advantages associated with vacuum techniques and the relatively high rate of deposition, especially ease in tailoring film composition by controlling input arc power [12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Synthesis and Characterization of Complex Nanostructured Thin Films Based on Titanium for Industrial Applications

et al. 2020

View full text Add to dashboard Cite

Titanium-based composites—titanium and silver (TiAg) and titanium and carbon (TiC)—were synthesized by the Thermionic Vacuum Arc (TVA) method on substrates especially for gear wheels and camshaft coating as mechanical components of irrigation pumps. The films were characterized by surface morphology, microstructure, and roughness through X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Small-Angle Neutron Scattering (SANS). The silver (Ag) films crystallized into a cubic system with lattice a = 4.0833 Å at room temperature, indexed as cubic Ag group Fm3m. The crystallites were oriented in the [111] direction, and mean grain size was <D>111 = 265 Å. The TiC structure revealed a predominant cubic TiC phase, with a = 0.4098 as a lattice parameter determined by Cohen’s method. Average roughness (Ra) was 8 nm for the as-grown 170 nm thick TiAg film, and 1.8 nm for the as-grown 120 nm thick TiC film. Characteristic SANS contribution was detected from the TiAg layer deposited on a substrate of high-quality stainless steel with 0.45% carbon (OLC45) in the range of 0.015 Å−1 ≤ Q ≤ 0.4 Å−1, revealing the presence of sharp surfaces and an averaged triaxial ellipsoidal core-shell object.

show abstract

“…Additionally, SiC is recognized as a wide-bandgap semiconductor which can be doped both n-and p-type and it allows a natural oxide to be grown on its surface for the purpose of certain device fabrication [8]. Si -C and SiC thin films can be obtained by various methods such as Chemical Vapor Deposition (CVD) [9,10], Pack cementation [11][12][13], Electrophoretic deposition [14], Molecular Beam Epitaxy (MBE), Plasma spray [15] or Thermionic Vacuum Arc (TVA) method [16,17]. The purpose of this paper is to synthesize Nitrogen doped Silicon Carbide nanostructures by TVA method.…”

Section: Introductionmentioning

confidence: 99%

Structural and electrical properties of N doped SiC nanostructures obtained by TVA method

et al. 2015

View full text Add to dashboard Cite

Ionized nitrogen doped Si-C thin films at 200°C substrate temperature were obtained by Thermionic Vacuum Arc (TVA) method. To increase the energy of N, C and Si ions, -400V, -600V and -1000V negative bias voltages was applied on the substrate. The 400nm, 600nm and 1000nm N-SiC coatings on glass was deposed. To characterize the structure of as-prepared N-SiC coatings, Transmission Electron Microscopy (TEM), High Resolution Transmission Electron Microscopy (HRTEM), X-Ray and Photoelectron Spectroscopy (XPS) techniques was performed.Electrical conductivity was measured comparing the potential drop on the structure with the potential drop on a series standard resistance in a constant current mode. To justify the dependence of measured electrical conductivity by the temperature, we assume a thermally activated electrical transport mechanism.

show abstract

Investigation of the SiC thin films synthetized by Thermionic Vacuum Arc method (TVA)

Cited by 29 publications

References 14 publications

The Properties of Binary and Ternary Ti Based Coatings Produced by Thermionic Vacuum Arc (TVA) Technology

The Properties of Binary and Ternary Ti Based Coatings Produced by Thermionic Vacuum Arc (TVA) Technology

Synthesis and Characterization of Complex Nanostructured Thin Films Based on Titanium for Industrial Applications

Structural and electrical properties of N doped SiC nanostructures obtained by TVA method

Contact Info

Product

Resources

About