Investigation of the RF plasma jet system for deposition of LiCoOx thin films

Hubička, Zdeněk; Čada, Martin; Jakubec, Ivo; Bludská, Jana; Málková, Zuzana; Trunda, Bohumil; Ptáček, Pavel; Přidal, J.; Jastrabı́k, L.

doi:10.1016/s0257-8972(03)00583-8

Cited by 12 publications

(6 citation statements)

References 15 publications

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“…Several techniques have been adopted by researchers around the world such as electrophoretic deposition 4,70 , electrospinning, plasma processing [71][72][73][74] and sputtering 75-77 .…”

Section: Binder Free Electrodes For Improved Characteristicsmentioning

confidence: 99%

Plasma Enabled Synthesis and Processing of Materials for Lithium‐Ion Batteries

Joseph

Murdock

Seo

et al. 2018

Adv Materials Technologies

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Li-Ion batteries (LIBs) dominate the energy storage market owing to their versatility and efficient energy storage. Also, for electric vehicle applications, batteries with better power, safety and cyclability are needed. To address the issues related to lower power density, lesser cyclability, low capacity retention, safety, cost etc. several modifications like nanostructuring, 3D and 2D architectures, doping, core shell particles, binder free electrodes, modified electrolytes and separators have been employed. Plasma technologies can reduce the number of steps and time required for the synthesis of nanoarchitectures and material modifications, hence a reduction in the cost required to produce LIBs against the high initial This article is protected by copyright. All rights reserved. 2investment required. This review paper aims at emphasising plasma enabled modification and synthesis techniques for LIB electrodes, separators, electrolytes and for recent advances like solid state and flexible batteries.

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“…Several techniques have been adopted by researchers around the world such as electrophoretic deposition 4,70 , electrospinning, plasma processing [71][72][73][74] and sputtering 75-77 .…”

Section: Binder Free Electrodes For Improved Characteristicsmentioning

confidence: 99%

Plasma Enabled Synthesis and Processing of Materials for Lithium‐Ion Batteries

Joseph

Murdock

Seo

et al. 2018

Adv Materials Technologies

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“…Its most characteristic and significant property is the formation of a well defined plasma channel what makes the plasma jet sputtering system especially convenient for the deposition on substrates with complicated shapes, e.g. To the long series of materials which has been successfully prepared by means of the plasma jet sputtering system TiO 2 [3], TiN [4], AlN [5], CrN [6], Cu 3 N [7], Al 2 O 3 [5], LiCoO x [8], ZnO [9] or SrTiO 3 (STO) and Ba x Sr 1−x TiO 3 (BSTO) ceramics [10] belong. [2].…”

Section: Introductionmentioning

confidence: 99%

Experimental Study of the Discharge in the Low Pressure Plasma Jet Sputtering System

Klusoiň

Kudrna

Kolpaková

et al. 2013

Contrib. Plasma Phys.

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This article reports on experimental study of the discharge in the low pressure plasma jet sputtering system operated in the continuous DC regime of the discharge excitation. Presented measurements were focused on the description of the working pressure impact on the basic discharge characteristics. The pressure dependence of the gas flow velocity from the nozzle was examined by means of Pitot tube. Further an approximate measurement of the discharge current spatial distribution was realized as well. The second half of the article presents results from Langmuir probe measurements under the conditions of low pressures in the range of units of pascals. These conditions are of special importance in some particular applications especially in preparation of thin layers with high crystallinity. Used experimental setup enabled to perform Langmuir probe diagnostic with spatial resolution both in the plasma jet axis direction and in the direction perpendicular to it.

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“…TiN [7], AlN [8], CrN [9], Cu 3 N [10], TiO x [11], Al 2 O 3 [6], CN x [12], diamondlike-carbon (DLC) layers [13] and LiCoO x [14]. In these applications, usually a metallic or single component hollow cathode was reactively sputtered in a suitable working gas.…”

Section: Introductionmentioning

confidence: 99%

Spatial Distribution of Plasma Parameters in DC‐Energized Hollow Cathode Plasma Jet

Leshkov

Kudrna

Chichina

et al. 2010

Contrib. Plasma Phys.

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DC energized hollow cathode plasma jet system was examined by radially movable Langmuir probe. Radial distribution of electron concentration, plasma and floating potentials and mean electron energy were obtained from measured probe characteristics at the distance 17 mm downstream of the hollow cathode -nozzle. The radial dependence of plasma parameters was measured for distances from the system axis 0-120 mm in the discharge containing Ar and O2. Two scenarios were used: addition of O2 into the nozzle and into the plasma vessel. The differences in measured floating and plasma potential, electron density and mean electron energy radial courses obtained in the two scenarios are qualitatively explained. In addition temporal dependences of main plasma parameters for discharges in clean argon and argon-oxygen mixture were investigated that demonstrate system stability and its applicability for deposition of layers containing Ti. TiOx thin films were deposited onto glass substrates and examined by AFM and ellipsometry. It is illustrated that the differences in plasma parameters in the two scenarios of oxygen addition influence the layer properties.

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Investigation of the RF plasma jet system for deposition of LiCoOx thin films

Cited by 12 publications

References 15 publications

Plasma Enabled Synthesis and Processing of Materials for Lithium‐Ion Batteries

Plasma Enabled Synthesis and Processing of Materials for Lithium‐Ion Batteries

Experimental Study of the Discharge in the Low Pressure Plasma Jet Sputtering System

Spatial Distribution of Plasma Parameters in DC‐Energized Hollow Cathode Plasma Jet

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