Investigation of the boron incorporation in polycrystalline CVD diamond films by TEM, EELS and Raman spectroscopy

A Brief Review on theIn SituSynthesis of Boron-Doped Diamond Thin Films

“…This leads to the incorporation of boron atoms into both the growing {100} and {111} diamond thin film surfaces. It was found that there is preference (almost 10 times) in the incorporation of boron in {111} growth sectors [28][29][30]. Boron substitution, diamond crystallinity, and diamond surface morphology are closely related and greatly influence each other during the in situ synthesis of BDD thin films [66,67].…”

“…The conductivity of diamond thin films can be attuned to an application requirement typically by carrying out suitable doping events. Amongst the available conductive (doped, p-and n-type [9][10][11][12][13][14][15][16]) diamond thin films, the p-type semiconducting boron-doped diamond (BDD) thin films [17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35] are the most popular ones and are being studied extensively. BDD thin films are synthesized by substituting some of the sp 3 hybridized carbon atoms in the diamond lattice with boron atoms.…”

Structure and superconductivity of isotope-enriched boron-doped diamond

“…These inclusions can be accidently detected in the samples with the laser spot of 1-2 µm. The formation of slightly doped diamond is believed to be due to the formation of diamond growth sectors which accept less boron [19].…”

“…Note that inhomogeneous incorporation of boron in BDD complicates evaluation of an isotope effect in these experiments. We compared Raman spectra from the most heavily boron-doped regions of our samples, assuming that these regions belong to {111} sectors of diamond grains [19]. A signature of the most heavily doped regions is an extreme low-frequency shift of all the BDD Raman bands.…”

Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

“…Diverse reports on B-, P-, and S-doped diamond highlight the effect of various film deposition conditions and structural evolution, which facilitates in defining the properties of the films. [6][7][8] Nitrogen is another potential n-type dopant in diamond since it incorporates either diluted in substitutional sites of the diamond lattice (type Ib-low percentage of N) or in small aggregates (type Ia-high percentage of N). Nitrogen incorporation results in significant mechanical stress and increases the number of vacancy defects due to distortion of the diamond lattice.…”