This paper demonstrates that SIMS is a very sensitive method for determining the hydroxyl content of thin oxide films on metals and alloys, provided standards are used to calibrate the technique. Detection limits of ±0.1% hydroxyl have been achieved. Within this limit, no hydroxyl is present within passive films on iron and nickel, while passive films on Fe−25Cr contain only
0.6±0.1%normalhydroxyl
within the inner chromium‐rich part of the film and
1.1±0.1%normalhydroxyl
within the outer iron‐rich part of the film. Nonpassive films, such as the electropolish film on nickel and Fe−25Cr, and the film formed on nickel in F− containing solution, contain significant amounts of hydroxyl ions.