Investigation of structured TiAlN- and TiO2-coatings with moth-eye-like surface morphologies

Burmeister, Frank; Schäffer, E.; Kleer, G.; Döll, W.; Bläsi, Bénédikt; Gombert, Andreas

doi:10.1016/j.surfcoat.2005.01.079

Cited by 12 publications

(7 citation statements)

References 9 publications

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“…In yet another instance, we present the use of silicon nitride pillar arrays as templates to control the growth density of TiN nanopyramids. TiN coatings are sought after for medical implant applications for the high degree of bioactivity they exhibit in addition to remarkable corrosion and wear resistance [41][42][43]. These coatings also hold promise for use in microelectronic applications owing to the high conductivity and excellent performance as an adhesion layer [44].…”

Section: Controlling Growth Density Of Pvd Grown Tin Nanopyramidsmentioning

confidence: 99%

“…About three pyramids were found to be growing from the top of each of the Si 3 N 4 pillars (figure 4(c)). Pyramidal surface features obtained from the PVD growth are due to the (111) orientation of the TiN crystals [43]. The open, columnar microstructure of this topography type is caused by the limited surface diffusion under conditions of relatively low deposition temperatures and low ion energy (bias voltages) of the deposition process [45,46].…”

Section: Controlling Growth Density Of Pvd Grown Tin Nanopyramidsmentioning

confidence: 99%

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Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

Krishnamoorthy¹,

Gerbig²,

Hibert³

et al. 2008

Nanotechnology

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We demonstrate the use of copolymer micelle lithography using polystyrene-block-poly(2-vinylpyridine) reverse micelle thin films in their as-coated form to create nanopillars with tunable dimensions and spacing, on different substrates such as silicon, silicon oxide, silicon nitride and quartz. The promise of the approach as a versatile application oriented platform is highlighted by demonstrating its utility for creating super-hydrophobic surfaces, fabrication of nanoporous polymeric membranes, and controlling the areal density of physical vapor deposition derived titanium nitride nanostructures.

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Section: Controlling Growth Density Of Pvd Grown Tin Nanopyramidsmentioning

confidence: 99%

Section: Controlling Growth Density Of Pvd Grown Tin Nanopyramidsmentioning

confidence: 99%

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

Krishnamoorthy¹,

Gerbig²,

Hibert³

et al. 2008

Nanotechnology

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“…Then a highly ordered periodic modulation was created on the surface by reactive-ion etching. Alternatively, columns terminated by pyramid-shaped tips were deposited on silicon and steel substrates by reactive radio-frequency magnetron sputtering [71].…”

Section: Advancements In the Manufacturing Methodsmentioning

confidence: 99%

Material design and structural color inspired by biomimetic approach

Saitô

2011

Science and Technology of Advanced Materials

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Generation of structural color is one of the essential functions realized by living organisms, and its industrial reproduction can result in numerous applications. From this viewpoint, the mechanisms, materials, analytical methods and fabrication technologies of the structural color are reviewed in this paper. In particular, the basic principles of natural photonic materials, the ideas developed from these principles, the directions of applications and practical industrial realizations are presented by summarizing the recent research results.

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“…The surface morphology of sputtered TiAlN coating is composed of the columnar crystallite which the columns are separated by porosity on the grain boundary [6,10,16]. The individual columns of coating surface morphology are eliminated on the top by tetragonal pyramids indicates a NaCl-Type of TiAlN crystal lattice [17]. It was found that the coating surface roughness of sputtered TiAlN coating also depends on the amount and the size of the coating porosity [18].…”

Section: Resultsmentioning

confidence: 99%

Surface Morphology of Sputtered Titanium-Aluminum-Nitride Coatings

Budi

Razali

Nizam

2020

SPEKTRA

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A study on the surface morphology of sputtered TiAlN coatings is presented. The coatings were deposited by DC magnetron sputtering on tungsten carbide insert tools. The surface morphology was characterized by using Atomic Force Microscopy (AFM), and the surface roughness was indicated by RMS roughness value. It was observed that the TiAlN coating surface morphology was rough as the negative substrate bias and nitrogen flow rate are increased. The evolution of the sputtered TiAlN coatings surface morphology was due to the competition between particle diffusion and re-scattering effect during the sputtering process. At high negative substrate bias and nitrogen flow rate, the re-scattering effect was prominent, leading to the high roughness of the sputtered TiAlN coating surface.

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Investigation of structured TiAlN- and TiO2-coatings with moth-eye-like surface morphologies

Cited by 12 publications

References 9 publications

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

Material design and structural color inspired by biomimetic approach

Surface Morphology of Sputtered Titanium-Aluminum-Nitride Coatings

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