Investigation of silicon wear against non-porous and micro-porous SiO₂ spheres in water and in humid air

Abstract

Tribochemical wear, a method to achieve controlled material removal without residual damage on substrates, plays a very important role in super-smooth silicon surface manufacturing.

Thickness and Structure of Adsorbed Water Layer and Effects on Adhesion and Friction at Nanoasperity Contact

“…Finally, besides interfacial forces, surface wear caused by frictional shear stress is likely to complicate the dynamics [4,159]. Tribochemical reactions may occur between water molecules and the solid surface when the activation energy of these reactions is reduced by an external mechanical action [5,[160][161][162][163][164][165][166][167]. The structure and surface energy of the adsorbed water layer on dynamically changing tribological interfaces may also play vital roles in the mechanochemistry involved in the material removal phenomenon.…”

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

“…Last but not least, as we know, the CMP performance depends on the balance between chemical and mechanical effects. For a chemical reaction, Qi et al [65] reported that mesoporous abrasives can store water in their micropores, increasing their chemical activity in the CMP process. According to the BJH pore volume results, the RmSiO 2 -1 has the largest pore volumes due to its abundant micropores.…”

Siloxane-inorganic chemical crosslinking of hyaluronic acid – based hybrid hydrogels: Structural characterization

“…Fig.4B. The identified bands were assigned according to literature data(Alkrad, Mrestani, Stroehl, Wartewig, & Neubert, 2003;Cai, Neyer, Kuckuk, & Heise, 2010;Jayes, Hard, Séné, Parker, & Jayasooriya, 2003;Kotzianová, Rebícek, Pokorný, Hrbác, & Velebný, 2016;Qi et al, 2016;Sánchez-Téllez, Téllez-Jurado, Rodríguez-Lorenzo, Mazo et al, 2017; Sun, Yanagisawa, Kunimoto, Nakamura, & Homma, 2016;Sun, Yanagisawa, Kunimoto, Nakamura, & Homma, 2017;Tamayo & Rubio, 2010). Several Raman bands related to sodium hyaluronate hydrogels and silica-based hybrid materials are observed in the HA-based hybrid hydrogels Raman spectra.…”

“…Several Raman bands related to sodium hyaluronate hydrogels and silica-based hybrid materials are observed in the HA-based hybrid hydrogels Raman spectra. The most important Raman scattering due to different bond vibrations related to sodium hyaluronate (HA)(Alkrad et al, 2003;Kotzianová et al, 2016), chemical modification of HA with APTES(Sun et al, 2016(Sun et al, , 2017 and PDMS-modified SiO 2 crosslinked matrix(Qi et al, 2016; Sun et al, 2016) in the HA-based hybrid hydrogels are: 1) the band at 820 cm -1 is due to stretching vibrations of − − C O C bonds from the hyaluronic acid repetitive units (D-glucuronic acid and N-acetyl-D-glucosamine, linked via alternating β-(1→ 4) and β-(1→3) glycosidic bonds); 2) the band around 1415 cm -1 may be assigned to the bending vibration of CH 2 group bonded to the Si atom − Si CH ( ) 2 ; 3) the band at 1135 cm -1 is attributed to the − − Si O Si bond-bending vibration; 4) the bands around 1036 cm -1 and 945 cm -1 are assigned to − − O Si O bonds; 5) the band around 980 cm -1 is due to − Si OH bonds. Likewise, the following bands show the correct incorporation of PDMS into the SiO 2 network(Cai et al, 2010;Jayes et al, 2003;Sánchez-Téllez, Téllez-Jurado, Rodríguez-Lorenzo, Mazo et al, 2017;Tamayo & Rubio, 2010): 1) the bands around 1415 cm -1 and 1265 cm -1 are assigned to the asymmetric and symmetric bending vibration of CH 3 group from PDMS, respectively; 2) the band at 865 cm -1 is attributed to the symmetric rocking of CH 3 from PDMS; 3) the band at 790 cm -1 is due to − − C Si C asymmetric stretching vibration and to the rocking vibration of CH 3 group from PDMS; 4) the band at 707 cm -1 is due to − − C Si C symmetric stretching vibration; 5) the band at 689 cm -1 is attributed to − Si CH 3 symmetric rocking; 6) the band at 495 cm -1 is assigned to − − O Si O bonds.…”

“…4B. The identified bands were assigned according to literature data(Alkrad, Mrestani, Stroehl, Wartewig, & Neubert, 2003;Cai, Neyer, Kuckuk, & Heise, 2010;Jayes, Hard, Séné, Parker, & Jayasooriya, 2003;Kotzianová, Rebícek, Pokorný, Hrbác, & Velebný, 2016;Qi et al, 2016;…”