1996
DOI: 10.1109/27.491691
|View full text |Cite
|
Sign up to set email alerts
|

Investigation of plasma produced by electron pulse ablation

Abstract: Short electron pulses with high energy are a very promising tool for the controlled ablation and deposition of materials. The plasmas induced by the electron beam irradiation are distinguished by their high degree of ionization and excitation. A source for pulsed electron beam is the channel spark device. It delivers pulsed high current and self-focused electron beams (about 15 keV, 1 kA, 100 ns). For deposition technology, the plasma beam is the decisive element of the pulsed vapor deposition (PVD) equipment.… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

2
4
0

Year Published

2001
2001
2017
2017

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 10 publications
(6 citation statements)
references
References 4 publications
2
4
0
Order By: Relevance
“…This is in accordance with our calculations, whereby the average electron density is ~10 23 m -3 . It has been found that the average temperature of the plasma varies from 1 eV to 1.25 eV [15,16]. The results based on our calculations indicate that the plasma temperature is ~1 eV, which is in quantitative agreement with the experimental data.…”
Section: Model Assessmentsupporting
confidence: 81%
See 3 more Smart Citations
“…This is in accordance with our calculations, whereby the average electron density is ~10 23 m -3 . It has been found that the average temperature of the plasma varies from 1 eV to 1.25 eV [15,16]. The results based on our calculations indicate that the plasma temperature is ~1 eV, which is in quantitative agreement with the experimental data.…”
Section: Model Assessmentsupporting
confidence: 81%
“…Experimental results have reported electron density values in the range of 10 22 -10 23 m -3 [15][16][17]. This is in accordance with our calculations, whereby the average electron density is ~10 23 m -3 .…”
Section: Model Assessmentsupporting
confidence: 80%
See 2 more Smart Citations
“…Of course, there are many industrial processes that require a higher level of resistance to corrosion. Carburizing has been applied to austenitic stainless steel to promote increased wear and corrosion resistance [93]. Nanometricsized carbide-based crystallites have been synthesized successfully through the pulsed nanocrystalline plasma electrolytic carburizing method on the surface of 316 austenitic stainless steel [94].…”
Section: Stainless Steel Corrosion and Nanostructurementioning
confidence: 99%