The impact ionization rate in uniaxially strained silicon is evaluated from viewpoints of the ionization threshold β and maximum electric field E
m for the first time. Strain and temperature dependences of β are investigated on the basis of the change in slope in a universal relation while E
m, which is also dependent on strain and temperature, is investigated on the basis of the change in saturation voltage V
DSAT. The impact ionization rate is a function of β and E
m such that we also evaluated strain and temperature dependence of multiplication factor M - 1 (= I
sub/I
D) to determine the major concern of change in impact ionization rate. The result shows that the change in E
m due to the change in potential drop along the channel is the major concern in a uniaxially strained silicon n-channel metal oxide semiconductor field effect transistor (nMOSFET).