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2003
DOI: 10.1088/0957-0233/15/2/007
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Investigation of gas species in a stainless steel ultrahigh vacuum chamber with hot cathode ionization gauges

Abstract: A residual gas analyser was used to study the gas species evolved during degassing of a stainless steel 304 ultrahigh vacuum chamber before and during bake-out of the chamber at temperatures up to 235 • C with two different types of hot cathode ionization gauge. In both cases, when the ionization gauges were turned on and degassed the dominant outgassing species were H 2 and H 2 O. During bake-out of the chamber the main gas species detected were H 2 , CO (mass 28), and H 2 O. When the chamber was finally bake… Show more

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Cited by 8 publications
(7 citation statements)
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“…Initially, the loss rate versus trap depth at the apparatus base pressure is recorded. These losses are due to common vacuum system species such as H 2 and CO [32,33]. In addition to external gas collisions, the baseline loss rate includes Majorana losses and/or 2-and 3-body intratrap losses, Γ 0 .…”
Section: Discussionmentioning
confidence: 99%
“…Initially, the loss rate versus trap depth at the apparatus base pressure is recorded. These losses are due to common vacuum system species such as H 2 and CO [32,33]. In addition to external gas collisions, the baseline loss rate includes Majorana losses and/or 2-and 3-body intratrap losses, Γ 0 .…”
Section: Discussionmentioning
confidence: 99%
“…The same calibration procedure was applied to three molecular species, Hydrogen (H 2 ), Nitrogen (N 2 ), and Carbon Dioxide (CO 2 ). They were selected because of their importance in many vacuum systems [38,39]. Unlike atoms, these species have a rich internal structure and can undergo both elastic and inelastic collisions.…”
Section: Methodsmentioning
confidence: 99%
“…Third, there is an unknown mixture of gases constituting the base pressure in the apparatus mostly due to backflow through the turbo pump and vacuum chamber outgassing [38,39]. These background gases contribute a base loss rate, Γ bg , to which the test gas loss rate is added.…”
Section: Systematic Errorsmentioning
confidence: 99%
“…Recently Akimichi et al succeeded in lowering the measurement range down to 10 −10 Pa, which isolates gas phase ions and ESD ions and then removes ESD ions with an energy filter [7][8][9]. The problem of H 2 outgassing in a stainless steel vacuum chamber has been known to be a serious obstacle in achieving XHV but it has not been fundamentally solved [10][11][12].…”
Section: Methodsmentioning
confidence: 99%