Investigation of fiber laser micro-channel depth on silicon wafer

Kar, Tuhin; Deshmukh, Swarup S.; Goswami, Arjyajyoti

doi:10.1016/j.matpr.2022.02.024

Cited by 5 publications

(4 citation statements)

References 12 publications

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“…Various techniques were used to fabricate micro-patterns on mold like lithographic/etching technology, for instance, UV-ray and x-ray lithography [37], plasma etching and electron beam etching [38,39], focused ion beam machining [40], micro-milling [41][42][43], micro-EDM [44], CNC milling [45,46], laser ablation [47][48][49][50][51], etc The combination of micro or nano mold inserts with macro mold tools may be used to produce micro or nano elements. Micro and nano-combined components may be mass-produced; a HE procedure is provided.…”

Section: Micro Hot Embossing Processmentioning

confidence: 99%

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

Datta

Deshmukh²,

Kar³

et al. 2023

Eng. Res. Express

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Micro-hot embossing (micro-HE) of polymeric materials creates exact micro/nanoscaled designs. Micro-HE processes include plate-to-plate (P2P), roll-to-roll (R2R), and roll-to-plate (R2P). Micro-HE is preferred for large-scale production of micro-patterns on polymer substrates. However, the lack of simulation models for optimization and component design prevents the broad use of this technology. As the size of the micro patterns decreases from micron to sub-micron, it improves performance features. Micro-HE cannot be analyzed using software tools like injection molding since there is no macroscopic equivalent. Commercial simulation software covers injection molding and associated processes. No commercial tool covers all micro-HE process steps, variations, and boundary conditions. According to the authors, such review articles aren't in the literature. This article summarizes the simulation work in the micro-HE process field related to replication accuracy, and mold filling behaviour. In addition to this, various models were discussed based on properties of material, based on various forces participating in the HE process, and gives a detailed idea about mold-filling behavior and demolding analysis. Finally challenges and future scope related to modelling and simulation work in field of hot embossing has been presented.

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Section: Micro Hot Embossing Processmentioning

confidence: 99%

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

Datta

Deshmukh²,

Kar³

et al. 2023

Eng. Res. Express

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“…Laser beam drilling is a high-speed technology that creates accurate holes of micron size. It serves as a superior alternative to traditional mechanical drilling and broaching methods [5].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation on fiber laser micro drilling of Titanium grade 5: fabrication, nature-inspired optimization and analysis through image processing

Kar,

Goswami

2024

Eng. Res. Express

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This investigation showed that micro holes were created on Titanium grade 5 substrate surface using a 30 W fiber laser. The impact of the control factors such as scan speed, frequency, number of passes and power were studied on the responses namely heat affected zone (HAZ), hole circularity (HC) and deviation in diameter (DIV). The control factors were optimized using firefly algorithm. Mathematical models were developed for each response having significant R-square value. 3D surface plots were used to examine how the control parameters affected the response. The firefly algorithm identifies the optimal conditions for micro drilling as scan speed of 210 mm/s, frequency of 40 kHz, power of 8 W and total of 40 passes which improved experimental findings i.e. HC-0.974, DIV-37.02 µm and HAZ-19.53. After comparing the predicted values with the experimental findings, it was observed that the prediction error is lowest for HC (1.23 %) followed by DIV (13.9 %) and HAZ (16.9 %). Image processing technique was used to convert regular images into a digital format to extract useful information.

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“…The researchers also found that the process was highly repeatable, and the channel dimensions could be controlled with high accuracy [14]. Kar et al (2022) investigated the use of ultrashort laser machining for fabricating microchannels in silicon. The study showed that the process was capable of producing high-quality microchannels with excellent surface quality and precise dimensions.…”

Section: Introductionmentioning

confidence: 99%

“…The study showed that the process was capable of producing high-quality microchannels with excellent surface quality and precise dimensions. The researchers also found that the process was highly efficient and had a high processing speed [15]. ultrashort laser machining is a promising technique for fabricating microchannels with high precision and accuracy.…”

Section: Introductionmentioning

confidence: 99%

Ultrafast Laser Fabrication of Microchannels on Aluminium Alloy Substrate

Cholkar,

Chatterjee,

Kinahan

et al. 2023

SSP

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Aluminium alloy 6061 has a versatile application within industrial heat exchangers, heat sinks, chemical equipment, and frames of aircraft and ships. Its physical and mechanical properties such as lightweight, high strength, corrosion resistance, and thermal and electrical conductivity make it a suitable material choice for these applications. Within thermal and micro-electromechanical applications, such as heat exchanges, radiators, and heat sinks used in microelectronics, the dissipation of heat plays an important role. For optimum heat dissipation, a higher surface area is required. This can be achieved by modifying the surface by fabricating microchannels. A number of processing techniques are used for fabricating microchannels on different materials. A laser is a flexible non-contact machining tool that may be used to create any profile or contour on practically any material. In recent times due to the advancement in laser technology, the use of ultrafast laser material processing is one potential route toward further extending the fabrication of high-quality microchannels without defects caused due to heat-affected zones and in a sustainable manner. In this paper, we present an experimental work of fabrication of microchannels on an aluminium alloy 6061 surfaces by using a low power (<4 W) 400 fs laser system. The dimensional accuracy of the fabricated microchannels is assessed using scanning electron microscopy and 3D profilometry. Furthermore, as processing speed and scale is of importance in industrial laser processes, the use of scanning optics is examined as a means of developing a rapid and scalable ultrafast laser process.

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Investigation of fiber laser micro-channel depth on silicon wafer

Cited by 5 publications

References 12 publications

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

Experimental investigation on fiber laser micro drilling of Titanium grade 5: fabrication, nature-inspired optimization and analysis through image processing

Ultrafast Laser Fabrication of Microchannels on Aluminium Alloy Substrate

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