2008
DOI: 10.1016/j.optmat.2007.02.034
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Investigation of biaxial stresses in diamond films deposited on a silicon substrate by the HF CVD method

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Cited by 18 publications
(11 citation statements)
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“…To account for the stronger resonant Raman scattering effect of sp bonded carbons, has been scaled by a factor of 50 [ 32 ]. and were estimated after the numerical deconvolution of each Raman spectrum [ 33 ]. The determination of the parameters is possible after numerical deconvolution of the experimental spectrum, shown for example in Figure 3 b.…”
Section: Resultsmentioning
confidence: 99%
“…To account for the stronger resonant Raman scattering effect of sp bonded carbons, has been scaled by a factor of 50 [ 32 ]. and were estimated after the numerical deconvolution of each Raman spectrum [ 33 ]. The determination of the parameters is possible after numerical deconvolution of the experimental spectrum, shown for example in Figure 3 b.…”
Section: Resultsmentioning
confidence: 99%
“…The diamond quality was evaluated from the Raman spectra by calculating the quality factor using the equation, Qi = Idiamond / (Idiamond + Ia-carbon / 233), where, Idiamond and Iacarbon are the integrated intensities of the diamond peak and the sum of the integrated intensities of the nondiamond carbon bands, respectively. 31 It is worthy to note that the laser fluence had a linear influence on the growth rate and the quality factor at 248 nm, but a super-linear influence at 193 nm. A larger grain size, a higher deposition rate, and a higher diamond quality factor were obtained with UV laser irradiation at 193 nm than those obtained at 248 nm, although the laser fluence of the 193 nm laser was one order of magnitude lower than that of the 248 nm laser.…”
Section: Resultsmentioning
confidence: 99%
“…The diamond quality was evaluated from the Raman spectra by calculating the quality factor using the equation, Q i = I diamond /(I diamond + I a-carbon /233), where I diamond and I a-carbon are the integrated intensities of the diamond peak and the sum of the integrated intensities of the nondiamond carbon bands, respectively. 30 Figure 2c shows the quality factors plotted as a function of the laser fluence for the 193 nm and the 248 nm lasers. The diamond quality factor increased with respect to the laser fluence.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…If the Raman line of diamond shifts towards values above or below ν 0 (for diamond monocrystal), this indicates that the studied sample is under compressive or tensile stresses, respectively. The residual stress, σ, can be calculated from the following relationship [31].…”
Section: The Raman Spectroscopymentioning
confidence: 99%