Investigation into defects occurring on the polymer surface during the photolithography process

Bosc, Dominique; Maalouf, Azar; Haesaert, Severine; Henrio, Frederic

doi:10.1016/j.apsusc.2007.01.019

Cited by 10 publications

(5 citation statements)

References 4 publications

(4 reference statements)

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“…In fact, the absorption coefficient induces low losses and does not explain the evolution of the optical losses as a function of the wavelength. Moreover, the radiative losses are negligible and the measured roughness on similar polymers13 is very low, of a few nm. Therefore, the surface losses could not be the major source of losses.…”

Section: Resultsmentioning

confidence: 96%

Study of optical losses in poly(3‐octylthiophene) planar and inverted RIB waveguides

Messaad¹,

Charrier²,

Mosqueron³

et al. 2011

J of Applied Polymer Sci

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Poly(3-octylthiophene), (P3OT) in addition to its electronics properties exhibits a high Kerr coefficient, n 2 , due to its third order nonlinear dielectric susceptibility. At the wavelength of 1550 nm, this coefficient n 2 is one of the highest. So, this material should be suitable to build integrated all optical switching devices. To construct this device, it is necessary to make a singlemode optical waveguide. For the time being, such a P3OT waveguide has never been obtained due to excessive optical losses. In view to produce single-mode waveguide with P3OT as a core, we investigated the different causes of these optical losses in the material and in the guiding structure. We characterized the optical transmission at key steps in its development. First, we demonstrated that the intrinsic polymer absorption is not a limiting factor at 1550 nm, and then we studied the transmission properties of planar (1-D confined light) and channel waveguides (2-D confined light). The results revealed that better transmission properties can be achieved using planar waveguides rather that confined channel waveguides. This article describes the development and the characterization of the guiding structures that enabled us to identify the main origins of optical losses.

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Section: Resultsmentioning

confidence: 96%

Study of optical losses in poly(3‐octylthiophene) planar and inverted RIB waveguides

Messaad¹,

Charrier²,

Mosqueron³

et al. 2011

J of Applied Polymer Sci

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“…Microfluidic applications [67,68] PE CVD Applications that require stable hydrophilic surface property in PDMS [69] Photografting of PEG Protein adsorption and cell adhesion [71] Imidazolium antimicrobial compound Catheter fabrication [73] UV-light curing Drug delivery [75] Soft lithography Replication of cardiovascular flow conditions [80] Bulk oxygen, nitrogen, or argon + collagen Adhesive free skin substitutes [82] Bulk plasma treatment and collagen Bone marrow-derived stromal cells [83] Hot embossing Photonic devices [85][86][87] Different bulk/ surface treatments Biomedical applications [88,89] Surface plasma treatment and collagen Mesenchymal stem cells [90] Different bulk/surface treatments Wettability and recyclability applications [91][92][93] Plasma/collagen treatment Tissue engineering-different cell types [94][95][96][97][98] Bulk modification Cell mechanobiology in muscle and nerve [99] The promising results of this study suggest the potential for reconstructing threedimensional vascularized tissue suitable for implantation. Photolithographic masks were designed to emulate the shape, size, and orientation of muscle fibers.…”

Section: Plasma Treatmentmentioning

confidence: 99%

“…PDMS has also gained great popularity in the production of microchannels and microfluidic devices, which can be used, for example, to reconstruct blood vessels [ 79 ] and vascularized tissues [ 80 ] or for rapid diagnostics [ 81 ]. The treatment of PDMS with different types of plasma was successfully used in [ 82 ], where the effect of the type of plasma on the polydimethylsiloxane/collagen composites’ adhesive properties on PDMS film was shown. Surface modifications to a polydimethylsiloxane substrate for stabilizing prolonged bone marrow stromal cell culture were described in [ 83 ].…”

Section: Introductionmentioning

confidence: 99%

Plasma-Activated Polydimethylsiloxane Microstructured Pattern with Collagen for Improved Myoblast Cell Guidance

Slepičková Kasálková,

Juřicová,

Fajstavr

et al. 2024

IJMS

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We focused on polydimethylsiloxane (PDMS) as a substrate for replication, micropatterning, and construction of biologically active surfaces. The novelty of this study is based on the combination of the argon plasma exposure of a micropatterned PDMS scaffold, where the plasma served as a strong tool for subsequent grafting of collagen coatings and their application as cell growth scaffolds, where the standard was significantly exceeded. As part of the scaffold design, templates with a patterned microstructure of different dimensions (50 × 50, 50 × 20, and 30 × 30 μm2) were created by photolithography followed by pattern replication on a PDMS polymer substrate. Subsequently, the prepared microstructured PDMS replicas were coated with a type I collagen layer. The sample preparation was followed by the characterization of material surface properties using various analytical techniques, including scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray photoelectron spectroscopy (XPS). To evaluate the biocompatibility of the produced samples, we conducted studies on the interactions between selected polymer replicas and micro- and nanostructures and mammalian cells. Specifically, we utilized mouse myoblasts (C2C12), and our results demonstrate that we achieved excellent cell alignment in conjunction with the development of a cytocompatible surface. Consequently, the outcomes of this research contribute to an enhanced comprehension of surface properties and interactions between structured polymers and mammalian cells. The use of periodic microstructures has the potential to advance the creation of novel materials and scaffolds in tissue engineering. These materials exhibit exceptional biocompatibility and possess the capacity to promote cell adhesion and growth.

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“…Finally, these displays were electrically characterized using a Keithley 2400 electrometer and Konica Minolta, after bonding a commercially available display driver. Further details of the display fabrication and characterization are given elsewhere [37,38].…”

Section: Conventional and Modified Processing For Display Preparationmentioning

confidence: 99%

An efficient and facile method to develop defect-free OLED displays

Solanki

Awasthi

Unni

2021

Semicond. Sci. Technol.

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Organic light emitting diodes (OLEDs) have captured the attention of the flat-panel display market owing to their high luminescence and versatile properties. However, substrate processing plays a critical part in the fabrication of OLED displays, demonstrated here as a passive matrix display, where plenty of defects, which appear during the processing stage, result in poor display quality and yield. Photolithography is the most common technique used to develop the electrode pattern on a transparent glass substrate. Nevertheless, poor lithography leads to display defects such as dead pixels, dark columns and bright horizontal rows. Moreover, shorts between anodes due to partial etching of the transparent conducting material or cathode lines are also common problems. Herein, we discuss a technique which drastically reduces the number of electrode shorts. Selective etching of the cathode in this technique makes the optical inspection of electrode shorts far easier due to the higher contrast ratio between Cr/glass compared to indium tin oxide/glass. Further, a focused laser beam is employed to ablate the identified shorts between two or more anode/cathode lines to make the short-free patterns. Additionally, a laser beam is also capable of isolating the burnt/dead pixels in a display, which otherwise lead to dark or bright lines during operation. Thus, our findings are very important for the display industry to develop defect-free panels and for the repair of certain operational defects to increase the production yield and lifetime.

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Investigation into defects occurring on the polymer surface during the photolithography process

Cited by 10 publications

References 4 publications

Study of optical losses in poly(3‐octylthiophene) planar and inverted RIB waveguides

Study of optical losses in poly(3‐octylthiophene) planar and inverted RIB waveguides

Plasma-Activated Polydimethylsiloxane Microstructured Pattern with Collagen for Improved Myoblast Cell Guidance

An efficient and facile method to develop defect-free OLED displays

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