Investigation by EELS and TRIM simulation method of the interaction of Ar+ and N+ ions with the InP compound

Berrouachedi, N.; Bouslama, M.; Abdellaoui, Abdelkader; Ghaffour, M.; Jardin, C.; Hamaida, K.; Monteil, Y.; Lounis, Zoubida; Ouerdane, A.

doi:10.1016/j.apsusc.2009.07.005

Cited by 6 publications

(3 citation statements)

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“…Figure 1 shows the resulting concentration profiles of nitrogen and carbon correlated with their mathematical models from the simulation programs. The simulated concentration profiles of carbon were determined by the TRIDYN code [14], and the simulated concentration profiles of nitrogen were determined by the SRIM code [15]. The correspondence between the measured and calculated depth profiles of the carbon distribution is very good.…”

Section: Resultsmentioning

confidence: 99%

The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer

Vlcak

Cerny

Weiss³

et al. 2013

Journal of Nanomaterials

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The ion beam assisted deposition (IBAD) method was chosen for preparing a carbon thin film with a mixing area on a substrate of Ti6Al4V titanium alloy. Nitrogen ions with energy 90 keV were used. These form a broad ion beam mixing area at the interface between the carbon film and the substrate. We investigated the chemical composition by the glow discharge optical emission spectroscopy (GD-OES) method and the phases by the X-ray diffraction (XRD) method. The measured concentration profiles indicate the mixing of the carbon film into the substrate, which may have an effect on increasing the adhesion of the deposited film. The nanohardness and the coefficient of friction were measured. We found that the modified samples had a markedly lower coefficient of friction even after damage to the carbon film, and they also had higher nanohardness than the unmodified samples. The increased nanohardness is attributed to the newly created phases that arose with ion implantation of nitrogen ions.

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Section: Resultsmentioning

confidence: 99%

The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer

Vlcak

Cerny

Weiss³

et al. 2013

Journal of Nanomaterials

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“…The interaction process ions-matter occurred first with the outmost layers of the target which corresponds to the first peak. The interpretation of TRIM spectra is particularly based on the second peak of TRIM spectrum which corresponds to the creation of vacancies at this disturbed depth [24]. Figure 6 is given as an example.…”

Section: Simulation Methods Trimmentioning

confidence: 99%

AES, EELS and TRIM simulation method study of InP(100) subjected to Ar⁺, He⁺and H⁺ions bombardment.

Ghaffour

Abdellaoui

Bouslama

et al. 2012

EPJ Web of Conferences

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Abstract. Auger Electron Spectroscopy (AES) and Electron Energy Loss Spectroscopy (EELS) have been performed in order to investigate the InP(100) surface subjected to ions bombardment. The InP(100) surface is always contaminated by carbon and oxygen revealed by C-KLL and O-KLL AES spectra recorded just after introduction of the sample in the UHV spectrometer chamber. The usually cleaning process of the surface is the bombardment by argon ions. However, even at low energy of ions beam (300 eV) indium clusters and phosphorus vacancies are usually formed on the surface. The aim of our study is to compare the behaviour of the surface when submitted to He + or H + ions bombardment. The helium ions accelerated at 500V voltage and for 45 mn allow removing contaminants but induces damaged and no stoichiometric surface. The proton ions were accelerated at low energy of 500 eV to bombard the InP surface at room temperature. The proton ions broke the In-P chemical bonds to induce the formation of In metal islands. Such a chemical reactivity between hydrogen and phosphorus led to form chemical species such as PH and PH 3 , which desorbed from the surface. The chemical susceptibly and the small size of H + advantaged their diffusion into bulk. Since the experimental methods alone were not able to give us with accuracy the disturbed depth of the target by these ions. We associate to the AES and EELS spectroscopies, the TRIM (Transport and Range of Ions in Matter) simulation method in order to show the mechanism of interaction between Ar + , He + or H + ions and InP and determine the disturbed depth of the target by argon, helium or proton ions.

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“…For p-InP surface, type inversion has also been reported [24,25]. Recently, electron energy loss spectroscopy (EELS) has been used to investigate the interactions between the low energy Ar + (N + ) ions and the InP compound [26]. The InP surface is extremely sensitive to Ar + ions bombardment.…”

Section: Introductionmentioning

confidence: 99%

Effect of Ar+, He+, and S+ Irradiation on n-InP Single Crystal

Mahmood

Zhao

2014

Chinese Journal of Chemical Physics

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The irradiation effects of Ar + , He + and S + with energy from 10 eV to 180 eV on n-InP(100) surface are analyzed by X-ray photoelectron spectroscopy and low energy electron diffraction. After irradiation on the n-InP surface, damage on the surface, displacement of the Fermi level and formation of sulfur species on S + exposed surface are found and studied. Successive annealing is done to suppress the surface states introduced by S + exposure. However, it is unsuccessful in removing the damage caused by noble ions. Besides, S + ions can efficiently repair the Ar + damaged surface, and finally form a fine 2×2 InP surface.

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Investigation by EELS and TRIM simulation method of the interaction of Ar+ and N+ ions with the InP compound

Cited by 6 publications

References 24 publications

The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer

The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer

AES, EELS and TRIM simulation method study of InP(100) subjected to Ar⁺, He⁺and H⁺ions bombardment.

Effect of Ar+, He+, and S+ Irradiation on n-InP Single Crystal

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Investigation by EELS and TRIM simulation method of the interaction of Ar+ and N+ ions with the InP compound

Cited by 6 publications

References 24 publications

The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer

The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer

AES, EELS and TRIM simulation method study of InP(100) subjected to Ar+, He+and H+ions bombardment.

Effect of Ar+, He+, and S+ Irradiation on n-InP Single Crystal

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AES, EELS and TRIM simulation method study of InP(100) subjected to Ar⁺, He⁺and H⁺ions bombardment.