“…EELS sensitivity has been greatly increased by using multi-channel arrays to detect in parallel the inelastically scattered electrons [3]. This [4] or as a post-column imaging filter behind [5] are commercially available and they are shown in figure 1. Similarly to X-ray mapping using a Scanning Transmission Electron Microscope (STEM) coupled with an Energy Dispersive X-ray Spectrometer (EDXS), some laboratories are performing elemental mapping using STEM coupled with PEELS. The use of a PEELS coupled with a STEM was first introduced by Jeanguillaume and Colliex [7] as the "Spectrum-Imaging" method.…”