Investigating the effect of sputtering conditions on the physical properties of aluminum thin film and the resulting alumina template

Taheriniya, Shabnam; Parhizgar, Sara Sadat; Sari, A. H.

doi:10.1016/j.rinp.2018.03.060

Cited by 12 publications

(4 citation statements)

References 23 publications

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“…These values are consistent with the Al and Sc layer thickness in each sample and confirm that the 20 nm Al layers are more strongly crystallized than the Sc ones. Similar values for magnetron sputtered Al have been reported in previous work [26,27].…”

Section: Large Angle X-ray Diffraction Results For Al/sc Multilayer C...supporting

confidence: 90%

Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet

et al. 2021

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Section: Large Angle X-ray Diffraction Results For Al/sc Multilayer C...supporting

confidence: 90%

Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet

et al. 2021

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“…Most of the provided experiments focused on obtaining oxides on glasses as intermediate materials for further use as substrates for xerogels, conductive electrodes, templates for the synthesis of nanopillars, etc. [17][18][19][20][21]. The production of anodic oxide on the dielectric glass substrate is associated with several difficulties.…”

Section: Of 12mentioning

confidence: 99%

Optical Properties of Valve Metals Functional Thin Films Obtained by Electrochemical Anodization on Transparent Substrates

et al. 2022

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Nanostructured aluminum, tantalum, and vanadium oxide layers on glass substrates were obtained by electrochemical anodizing in oxalic and sulfuric–oxalic electrolytes. The morphological and optical properties of the obtained structures were investigated experimentally by scanning electron microscopy and transmission spectroscopy. Obtained oxide coatings are quasi-ordered arrays of vertical (aluminum oxide/tantalum oxide, aluminum oxide/vanadium oxide, and aluminum oxide obtained in the oxalic electrolyte) or non-ordered tree-like (aluminum oxide obtained in the sulfuric–oxalic electrolyte) pores depending on the initial film metal and anodizing technology. The light transmission in the range of 750–1200 nm is up to 60% for aluminum oxide/tantalum oxide/glass (annealed) and quasi-ordered aluminum oxide/glass structures, and around 40% for aluminum oxide/tantalum oxide/glass (not annealed) and aluminum oxide/vanadium oxide. Non-ordered aluminum oxide is characterized by low transmission (no more than 8%) but has a developed surface and may be of interest for the formation of films with poor adhesion on smooth substrates, for example, photocatalytic active xerogels. The refractive indices of dispersion of the obtained layers were calculated from the transmission spectra by the envelope method. The dispersion of the refractive indices of the obtained oxide films is insignificant in a wide range of wavelengths, and the deviation from the average value is assumed to be observed near the intrinsic absorption edges of the films. The glasses with proposed semi-transparent nanostructured oxide layers are promising substrate structures for subsequent sol–gel coating layers used in photocatalytic purification systems or up-conversion modules of tandem silica solar cells with forward and reverse illumination.

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“…A wide range of interacting factors influence magnetron deposition of thin films. These include gas composition (Bose et al ., 2018; Ţălu et al ., 2018), flow rate/pressure (Ma et al ., 2019; Lee et al ., 2020; Shakoury et al ., 2020), deposition time (Dallaeva et al ., 2012; Ma et al ., 2019; Lee et al ., 2020), deposition rate (Taheriniya et al ., 2018), power (Ma et al ., 2019; Lee et al ., 2020), distance of substrate from target (Sangwaranatee et al ., 2018), substrate temperature (C. Taheriniya et al ., 2018; Ma et al ., 2019; Rajabi Kalvani et al ., 2019) and the target fabrication process (Wu et al ., 2012, 2019; Liu et al ., 2020). Since the target itself is one of the key factors contributing to the microstructure of the substrate, the evaluation of plasma–microstructure is key to not only better understanding the process but also to allow for optimisation (Dallaeva et al ., 2012; Wu et al ., 2019; Chen et al ., 2020).…”

Section: Introductionmentioning

confidence: 99%

“…When competing phases occur, secondary phases may emerge leading to various effects such as Zener pinning that ultimately affect the local chemical reactivity (Huang et al ., 2018; Thiruvalluvan et al ., 2018). Additionally, we have previously shown that the aluminium sputter conditions can alter the micromorphology of the anodised alumina (Taheriniya et al ., 2018). Several studies have shown obstructions (e.g.…”

Section: Introductionmentioning

confidence: 99%

Quantitative SEM characterisation of ceramic target prior and after magnetron sputtering: a case study of aluminium zinc oxide

Jahangiri

Kalvani

Shapouri

et al. 2020

Journal of Microscopy

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Summary Till now electron microscopy techniques have not been used to evaluate the plasma–target interactions undergone during the magnetron sputtering process. The destructive nature of this interaction severely alters the target microstructure. Utilising quantitative microscopy techniques can shed light on the complex plasma and solid‐state processes involved which can ultimately lead to improved functional thin film deposition. As a representative functional material, aluminium‐doped‐zinc oxide (AZO) is an upcoming alternative to conventional transparent electrode wherein the process optimisation is of great importance. In this paper, we evaluate the pre‐ and post‐sputter field emission scanning electron microscopy (FESEM) data for ceramic AZO target fabricated at three final sintering temperatures (1100°C, 1200°C and 1300°C). In all cases, grain boundaries are merged in addition to a visible reduction in the secondary phases which makes segmentation‐based image analysis challenging. Through surface statistics (i.e. fractal dimension, autocorrelation length, texture aspect ratio and entropy) as a function of magnification we can quantify the electron microscopy image of the microstructure. We show that the plasma–microstructure interaction leads to an increase in autocorrelation length, texture aspect ratio and entropy for the optimum AZO ceramic sputtering target sintered at 1200°C. Furthermore, a maximum reduction in fractal dimension span (as determined by exponential regression) is also observed for 1200°C. In addition to the evaluation of plasma effects on sintering, our approach can provide a window towards understanding the underlying thin film growth mechanisms. We believe that this technique can be applied to the defect characterisation of a wide range of polycrystalline ceramic sputtering targets (e.g. ITO, CZTS, GAZO and so on) with the ultimate goal of improving the magnetron sputtering process and the resulting functional thin film. Lay Description Magnetron sputtering allows scientists to make functional thin films on the order of the nanoscale. In this technique, atoms are plucked from a ‘target’ then placed onto a substrate forming a thin nanometric film: all thanks to magnets, a special power supply and the fourth state of matter (plasma). Understanding what is going on and how to make a ‘good’ thin film is important for making better light emitting diodes, solar cells and light sensors. Scientists use electron microscopy to see what is going on in the microstructure of the sputtered thin films to fine tune the sputtering recipe. Here, for the first time, we have applied electron microscopy to see the surface of the microstructure before and after magnetron sputtering. This will help us understanding the plasma–microstructure interaction allowing us to make more informed decisions when fine‐tuning the sputtering process to get improved thin films. This is a case study of aluminium‐doped zinc oxide (AZO) target that could potentially replace indium tin oxide (ITO), which is widely used as a tra...

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Investigating the effect of sputtering conditions on the physical properties of aluminum thin film and the resulting alumina template

Cited by 12 publications

References 23 publications

Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet

Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet

Optical Properties of Valve Metals Functional Thin Films Obtained by Electrochemical Anodization on Transparent Substrates

Quantitative SEM characterisation of ceramic target prior and after magnetron sputtering: a case study of aluminium zinc oxide

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