2015
DOI: 10.1063/1.4913431
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Inversion-mode GaAs wave-shaped field-effect transistor on GaAs (100) substrate

Abstract: Inversion-mode GaAs wave-shaped metal-oxide-semiconductor field-effect transistors (WaveFETs) are demonstrated using atomic-layer epitaxy of La2O3 as gate dielectric on (111)A nano-facets formed on a GaAs (100) substrate. The wave-shaped nano-facets, which are desirable for the device on-state and off-state performance, are realized by lithographic patterning and anisotropic wet etching with optimized geometry. A well-behaved 1 μm gate length GaAs WaveFET shows a maximum drain current of 64 mA/mm, a subthresho… Show more

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Cited by 6 publications
(10 citation statements)
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“…Field effect transistors (FETs) are popular in integrated circuits because they are low-power devices whose structure allows for n- and p-channels to be packed together onto a semiconducting surface. The amount of transistors in processors doubles every few years; however, there is limit in the count of transistors that can fit in a space . This equates to a need of increasing processing speed and power, while approaching physical limitations. , There are many methods in development to either miniaturize or replace Si transistors, but using single-walled carbon nanotubes (SWNTs) as the semiconducting connection between source and drain has shown great potential. , …”
Section: Introductionmentioning
confidence: 99%
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“…Field effect transistors (FETs) are popular in integrated circuits because they are low-power devices whose structure allows for n- and p-channels to be packed together onto a semiconducting surface. The amount of transistors in processors doubles every few years; however, there is limit in the count of transistors that can fit in a space . This equates to a need of increasing processing speed and power, while approaching physical limitations. , There are many methods in development to either miniaturize or replace Si transistors, but using single-walled carbon nanotubes (SWNTs) as the semiconducting connection between source and drain has shown great potential. , …”
Section: Introductionmentioning
confidence: 99%
“…In Figure 5a, the dropcast sample has prominent peaks for semiconducting tubes (15,8) and (17,4) and what could either be a (12,6) metallic or (12,5) semiconducting SWNTs at the 194 cm −1 position. 45 The smaller diameter SWNTs is removed when subjected to ART, so regardless if it was a sc-or m-SWNTs, it is selectively detached; therefore, there is no need to further investigate its true conductivity further.…”
Section: ■ Introductionmentioning
confidence: 99%
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