Inverse problem of Mueller polarimetry for metrological applications

Novikova, Tatiana; Bulkin, Pavel

doi:10.1515/jiip-2020-0140

Cited by 7 publications

(7 citation statements)

References 20 publications

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Section: Symmetry Relations To Consider In Mueller Matrix Measurementsmentioning

confidence: 88%

“…This has been verified and shown that in any other measurement configuration the different sources of the non-zero off-diagonal elements mix, making it more difficult to identify the profile asymmetry, and the sensitivity may disappear at azimuth 0 deg. [19][20][21][22][23] As a consequence, special attention is required for the precise alignment of the sample before measurement, as any deviation from φ ¼ 90 deg leads to off-diagonal responses itself, which can be misleading. Using an ellipsometry tool with a precise rotation stage, the following test can be performed to identify the source of the MM off-diagonal response.…”

Section: Simulation Methodsmentioning

confidence: 99%

“…The off-diagonal elements are sensitive not only to the asymmetry but also to its direction 19 , 21 – 24 If a measurement is performed at φ=90 deg and then the grating is rotated by 180 deg (measuring at φ=−90 deg), the off-diagonal elements change sign. This is equivalent to measuring a structure that is asymmetric in the opposite direction (i.e., mirrored to the plane of incidence) at the same azimuthal angle.…”

Section: Symmetry Relations To Consider In Mueller Matrix Measurementsmentioning

confidence: 99%

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Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry: a theoretical study

Dikó,

Kiss,

Egri

et al. 2024

J. Micro/Nanopattern. Mats. Metro.

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Background: With the appearance of ever-smaller transistors and new structures, new metrological challenges also arise, including the detection of different structural defects. Mueller matrix (MM) measurement can provide an opportunity to investigate them.Aim: Defects can cause a deterioration in device performance; therefore, their characterization is particularly important. Our goal is to investigate the possibility of detecting asymmetry defects using MM measurement and to study the distinguishability of these structural imperfections in the case of forksheet field-effect transistor (FET).Approach: Simulation of MM measurements with different degrees and directions of forksheet FET's profile asymmetries. To quantify the distinguishability of the optical responses caused by the defects, the correlation between the asymmetry parameters was calculated. Since the precise alignment of a sample is a key factor in the detection of asymmetries, the effect of the alignment uncertainty and a method for filtering it out were also investigated.Results and Conclusions: MM measurement is sensitive to both the magnitude and direction of the profile bending and the shift of the dielectric wall. The correlation coefficients show that the optical responses of the asymmetry defects and the alignment error can be distinguished. The latter can even be eliminated with a method presented in this article.

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Section: Symmetry Relations To Consider In Mueller Matrix Measurementsmentioning

confidence: 88%

Section: Simulation Methodsmentioning

confidence: 99%

Section: Symmetry Relations To Consider In Mueller Matrix Measurementsmentioning

confidence: 99%

See 1 more Smart Citation

Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry: a theoretical study

Dikó,

Kiss,

Egri

et al. 2024

J. Micro/Nanopattern. Mats. Metro.

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“…With the cost function defined as Equation ( 19), the system parameter p sys could be obtained from the measured light intensity I meas by using the Levenberg-Marquardt algorithm [35].…”

Section: Calibration Of the Waveplate Retardance Fluctuationmentioning

confidence: 99%

Calibration of Waveplate Retardance Fluctuation Due to Field-of-View Effect in Mueller Matrix Ellipsometer

Jiang,

Zhang,

Jiang

et al. 2023

Photonics

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Leveraging their unique phase modulation characteristics, birefringent waveplates have been widely used in various optical systems. With the development of material science and manufacturing techniques, the polarization properties of waveplates have become increasingly complex and diverse. Among these properties, the field-of-view effect of the waveplate caused due to manufacturing defects or improper installation procedures is extremely difficult to calibrate and seriously affects the precision and accuracy of the relevant optical systems. In this paper, a calibration method that can compensate for the field-of-view effect of waveplates installed in the instrument is proposed. Moreover, to approve the fidelity of the proposed calibration method, a series of film thickness measurement experiments are carried out. The results show that under different installation conditions of the waveplates, the precision and accuracy of the film thickness measured with the proposed method significantly improved. This method can be expected to reduce the assembly difficulty of such optical systems, while also improving their accuracy and stability.

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“…Thus, by measuring these modulations or loss of polarization, we may deduce the polarimetric properties (e. g. diattenuation, birefringence, depolarization [7]) of a sample and use them for its characterization. This approach was widely explored in metrological applications [8,9], food quality control [10][11][12], pharmaceutical drug studies [13,14], biomedical diagnosis [15][16][17][18][19][20], etc. Using changes in tissue depolarization with pathology development for histology analysis and diagnosis was extensively studied in [21][22][23][24][25] for different types of tissue.…”

Section: Introductionmentioning

confidence: 99%

Optical diagnosis of gastric tissue biopsies with Mueller microscopy and statistical analysis

Novikova¹,

Kim²,

Lee³

et al. 2022

J. Eur. Opt. Society-Rapid Publ.

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We investigate a possibility of producing the quantitative optical metrics to characterize the evolution of gastric tissue from healthy conditions via inflammation to cancer by using Mueller microscopy of gastric biopsies, regression model and statistical analysis of the predicted images. For this purpose the unstained sections of human gastric tissue biopsies at different pathological conditions were measured with the custom-built Mueller microscope. Polynomial regression model was built using the maps of transmitted intensity, retardance, dichroism and depolarization to generate the predicted images. The statistical analysis of predicted images of gastric tissue sections with multi-curve fit suggests that Mueller microscopy combined with data regression and statistical analysis is an effective approach for quantitative assessment of the degree of inflammation in gastric tissue biopsies with a high potential in clinical applications.

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Inverse problem of Mueller polarimetry for metrological applications

Cited by 7 publications

References 20 publications

Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry: a theoretical study

Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry: a theoretical study

Calibration of Waveplate Retardance Fluctuation Due to Field-of-View Effect in Mueller Matrix Ellipsometer

Optical diagnosis of gastric tissue biopsies with Mueller microscopy and statistical analysis

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