Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry: a theoretical study
Boglárka Dikó,
Roberta Zsófia Kiss,
Dávid Egri
et al.
Abstract:Background: With the appearance of ever-smaller transistors and new structures, new metrological challenges also arise, including the detection of different structural defects. Mueller matrix (MM) measurement can provide an opportunity to investigate them.Aim: Defects can cause a deterioration in device performance; therefore, their characterization is particularly important. Our goal is to investigate the possibility of detecting asymmetry defects using MM measurement and to study the distinguishability of th… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.