Introduction

Behrisch, R.; Wittmaack, K.

doi:10.1007/3540534288_15

Cited by 36 publications

(28 citation statements)

References 81 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…When the cathode surface is struck by an impinging particle in a given energy range some atoms in the surface, referred to as primary knock on atoms, may gain substantial amount of the energy of the incoming ion through the collision. They in turn sputter or strike other atoms in the surface transferring momentum yet again (Behrisch and Wittmaack, 1991). The sputter yield also depends on the ion incident angle.…”

Section: A Sputter Yieldmentioning

confidence: 99%

Foundations of DC plasma sources

Guðmundsson

Hecimovic

2017

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

A typical dc discharge is configured with the negative cathode at one end and a positive anode at the other end, separated by a gas filled gap, placed inside a long glass cylinder. A few hundred volts between the cathode and anode is required to maintain the discharge. The type of discharge that is formed between the two electrodes depends upon the pressure of the working gas, the nature of the working gas, the applied voltage and the geometry of the discharge. We discuss the current-voltage characteristics of the discharge as well as the distinct structure that develops in the glow discharge region. The dc glow discharge appears in the discharge current range from µA to mA at 0.5 -300 Pa pressure. We discuss the various phenomena observed in the dc glow discharge, including the cathode region, the positive column, and striations. The dc glow discharge is maintained by the emission of secondary electrons from the cathode target due to the bombardment of ions. For decades the dc glow discharge has been used as a sputter source. Then it is often operated as an obstructed abnormal glow discharge and the required applied voltage is in the range 2 -5 kV. Typically, the cathode target (the material to be deposited) is connected to a negative voltage supply (dc or rf) and the substrate holder faces the target. The relatively high operating pressure, in the range from 2 -4 Pa, high applied voltages, and the necessity to have a conductive target limit the application of dc glow discharge as a sputter source. In order to lower the discharge voltage and expand the operation pressure range the lifetime of the electrons in target vicinity is increased through applying magnetic field, by adding permanent magnets behind the cathode target. This arrangement is coined the magnetron sputtering discharge. The various configurations of the magnetron sputtering discharge and its applications are described. Furthermore, the use of dc discharges for chemical analysis, the Penning discharge and the hollow cathode discharges and some of its applications are briefly discussed.

show abstract

Section: A Sputter Yieldmentioning

confidence: 99%

Foundations of DC plasma sources

Guðmundsson

Hecimovic

2017

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…The SARA observation of ~20% of incident solar wind being reflected as neutral hydrogen atoms has invalidated the earlier assumptions that the entire solar wind impacting the lunar surface is absorbed [18,19,20]. The observation of high reflection of incident solar wind protons as ENAs from the Moon suggest that similar processes can be expected on other atmosphere-less bodies in the solar system, such as Mercury, asteroids, Phobos.…”

Section: Discussionmentioning

confidence: 99%

Studying the Lunar—Solar Wind Interaction with the SARA Experiment aboard the Indian Lunar Mission Chandrayaan-1

Bhardwaj¹,

Barabash²,

Dhanya³

et al. 2010

AIP Conference Proceedings

View full text Add to dashboard Cite

The first Indian lunar mission Chandrayaan-1 was launched on 22 October 2008. The Sub-keV Atom Reflecting Analyzer (SARA) instrument onboard Chandrayaan-1 consists of an energetic neutral atom (ENA) imaging mass analyzer called CENA (Chandrayaan-1 Energetic Neutrals Analyzer), and an ion-mass analyzer called SWIM (Solar wind Monitor). CENA performed the first ever experiment to study the solar wind-planetary surface interaction via detection of sputtered neutral atoms and neutralized backscattered solar wind protons in the energy range ~0.01-3.0 keV. SWIM measures solar wind ions, magnetosheath and magnetotail ions, as well as ions scattered from lunar surface in the ~0.01-15 keV energy range. The neutral atom sensor uses conversion of the incoming neutrals to positive ions, which are then analyzed via surface interaction technique. The ion mass analyzer is based on similar principle. This paper presents the SARA instrument and the first results obtained by the SWIM and CENA sensors. SARA observations suggest that about 20% of the incident solar wind protons are backscattered as neutral hydrogen and ~1% as protons from the lunar surface. These findings have important implications for other airless bodies in the solar system.

show abstract

“…Analysis shows that the recoil spots are related to atoms recoiled from the second layer. They clearly do not coincide with any crystallographic direction, while the preferential ejections of low-energy sputtered atoms are usually observed along low-indexed lattice directions [29]. The observed positions of the recoil spots are close to the center of open directions ('atomic lens' [2] created by first-layer atoms) as shown at the top of Fig.…”

Section: B Separation Of Collision Sequences and Fractional Yieldsmentioning

confidence: 99%

Scattering and recoiling mapping of the Kr-Pt(111) and Ne-Ni(111) systems by SARIS

Bolotin

Kutana

Makarenko

et al. 2004

e-J. Surf. Sci. Nanotechnol.

View full text Add to dashboard Cite

The technique of angle resolved mapping of scattering and recoiling imaging spectra (SARIS) combined with computer simulations is demonstrated to be a valuable tool for characterization of atomic collision events on surfaces. The energy distributions of scattered Kr and Ne and fast recoiled Pt and Ni atoms from Pt(111) and Ni(111) surfaces were measured as a function of exit angle. The use of a large area microchannel plate (MCP) detector and time-of-flight (TOF) techniques decreases the collection time and increases the number of detected trajectories above that of other designs. Classical ion trajectory simulations using the three-dimensional scattering and recoiling imaging code (SARIC) are used to simulate the kinematics of the scattering and recoiling particles. It is shown that SARIS mapping allows one to probe the kinematics of both scattered and recoiled particles, the probability for their occurrence in specific trajectories, and the atomic layers from which the particles originate.

show abstract

Introduction

Cited by 36 publications

References 81 publications

Foundations of DC plasma sources

Foundations of DC plasma sources

Studying the Lunar—Solar Wind Interaction with the SARA Experiment aboard the Indian Lunar Mission Chandrayaan-1

Scattering and recoiling mapping of the Kr-Pt(111) and Ne-Ni(111) systems by SARIS

Contact Info

Product

Resources

About